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• W2890524056 abstract "Thermal atomic layer deposition (ALD) and plasma-enhanced ALD (PE-ALD) of Pt, using MeCpPtMe₃ as the precursor and O₂ gas or O₂ plasma as the reactant, are studied with <italic>in situ</italic> reflection Fourier transform infrared spectroscopy (FTIR) at different substrate temperatures." @default.
• W2890524056 created "2018-09-27" @default.
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• W2890524056 date "2018-01-01" @default.
• W2890524056 modified "2023-09-24" @default.
• W2890524056 title "Surface species during ALD of platinum observed with <i>in situ</i> reflection IR spectroscopy" @default.
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• W2890524056 doi "https://doi.org/10.1039/c8cp03585g" @default.
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