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- W2890715692 abstract "AbstractCorrespondence between threading dislocations (TDs) in epitaxial films and the etch pits observed upon selective chemical etching of the samples was studied in Ge/Si(001) heterostructures. It is established that the density of TDs revealed in epitaxial films with thicknesses h ≤ 1 μm can be significantly understated because of insufficient resolution of optical microscopy. Recommendations are given that increase the reliability of PD density estimation by means of structure-sensitive etching." @default.
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- W2890715692 date "2018-01-01" @default.
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- W2890715692 title "Достоверность выявления пронизывающих дислокаций в эпитаксиальных пленках с помощью структурно-чувствительного травления" @default.
- W2890715692 doi "https://doi.org/10.21883/pjtf.2018.20.46803.17322" @default.
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