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- W2890800435 abstract "A numerical study of EUV Bragg mirrors with superstructures is presented. These modifications of the standard Mo/Si mirror are periodic superlattices as well as depth grading of the superlattice multilayers. The main results concern a narrowing of the normal incidence peak and all-angle reflection at 13.5 nm. Best results are obtained with a combination of superlattices with 4 and 5 superperiods and depth grading. The effect of the spectral width of the EUV source is also taken into account." @default.
- W2890800435 created "2018-09-27" @default.
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- W2890800435 date "2018-09-19" @default.
- W2890800435 modified "2023-10-03" @default.
- W2890800435 title "Photonic superlattice multilayers for EUV lithography infrastructure" @default.
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- W2890800435 doi "https://doi.org/10.1117/12.2322410" @default.
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