FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2890826679> ?p ?o ?g. }

• W2890826679 endingPage "22529" @default.
• W2890826679 startingPage "22519" @default.
• W2890826679 abstract "This work investigates the role of the co-reactant for the atomic layer deposition of cobalt (Co) films using cobaltocene (CoCp2) as the precursor. Three different processes were compared: an AB process using NH3 plasma, an AB process using H2/N2 plasma, and an ABC process using subsequent N2 and H2 plasmas. A connection was made between the plasma composition and film properties, thereby gaining an understanding of the role of the various plasma species. For NH3 plasma, H2 and N2 were identified as the main species apart from the expected NH3, whereas for the H2/N2 plasma, NH3 was detected. Moreover, HCp was observed as a reaction product in the precursor and co-reactant subcycles. Both AB processes showed self-limiting half-reactions and yielded similar material properties, that is, high purity and low resistivity. For the AB process with H2/N2, the resistivity and impurity content depended on the H2/N2 mixing ratio, which was linked to the production of NH3 molecules and related radicals. The ABC process resulted in high-resistivity and low-purity films, attributed to the lack of NHx,x≤3 species during the co-reactant exposures. The obtained insights are summarized in a reaction scheme where CoCp2 chemisorbs in the precursor subcycle and NHx species eliminate the remaining Cp in the consecutive subcycle." @default.
• W2890826679 created "2018-09-27" @default.
• W2890826679 creator A5018346857 @default.
• W2890826679 creator A5032858345 @default.
• W2890826679 creator A5056823899 @default.
• W2890826679 creator A5064064108 @default.
• W2890826679 date "2018-09-05" @default.
• W2890826679 modified "2023-09-23" @default.
• W2890826679 title "Atomic Layer Deposition of Cobalt Using H₂-, N₂-, and NH₃-Based Plasmas: On the Role of the Co-reactant" @default.
• W2890826679 cites W1625412531 @default.
• W2890826679 cites W1769634872 @default.
• W2890826679 cites W1963968125 @default.
• W2890826679 cites W1966197671 @default.
• W2890826679 cites W1967637629 @default.
• W2890826679 cites W1967749052 @default.
• W2890826679 cites W1969171395 @default.
• W2890826679 cites W1969311283 @default.
• W2890826679 cites W1970541974 @default.
• W2890826679 cites W1981510839 @default.
• W2890826679 cites W1981548523 @default.
• W2890826679 cites W1984871324 @default.
• W2890826679 cites W1986120682 @default.
• W2890826679 cites W1986406156 @default.
• W2890826679 cites W1990794800 @default.
• W2890826679 cites W1991889436 @default.
• W2890826679 cites W1993283300 @default.
• W2890826679 cites W1996252418 @default.
• W2890826679 cites W1996462939 @default.
• W2890826679 cites W1996783389 @default.
• W2890826679 cites W2007157210 @default.
• W2890826679 cites W2014497112 @default.
• W2890826679 cites W2016838358 @default.
• W2890826679 cites W2026285925 @default.
• W2890826679 cites W2029757206 @default.
• W2890826679 cites W2030089482 @default.
• W2890826679 cites W2035931858 @default.
• W2890826679 cites W2037628463 @default.
• W2890826679 cites W2039898629 @default.
• W2890826679 cites W2040618728 @default.
• W2890826679 cites W2044666036 @default.
• W2890826679 cites W2045143949 @default.
• W2890826679 cites W2065177742 @default.
• W2890826679 cites W2065807486 @default.
• W2890826679 cites W2067828227 @default.
• W2890826679 cites W2071553677 @default.
• W2890826679 cites W2074398025 @default.
• W2890826679 cites W2075374897 @default.
• W2890826679 cites W2082059427 @default.
• W2890826679 cites W2088846964 @default.
• W2890826679 cites W2092400267 @default.
• W2890826679 cites W2103838121 @default.
• W2890826679 cites W2107237149 @default.
• W2890826679 cites W2110687642 @default.
• W2890826679 cites W2111458907 @default.
• W2890826679 cites W2112201942 @default.
• W2890826679 cites W2124126967 @default.
• W2890826679 cites W2133680600 @default.
• W2890826679 cites W2144537008 @default.
• W2890826679 cites W2152028377 @default.
• W2890826679 cites W2158932701 @default.
• W2890826679 cites W2162163123 @default.
• W2890826679 cites W2214248331 @default.
• W2890826679 cites W2261143360 @default.
• W2890826679 cites W2278369716 @default.
• W2890826679 cites W2333114585 @default.
• W2890826679 cites W2339842763 @default.
• W2890826679 cites W2509382493 @default.
• W2890826679 cites W2524846960 @default.
• W2890826679 cites W2558507278 @default.
• W2890826679 cites W2560682321 @default.
• W2890826679 cites W2564310272 @default.
• W2890826679 cites W2734345218 @default.
• W2890826679 cites W2734847624 @default.
• W2890826679 cites W2742038860 @default.
• W2890826679 cites W2744785415 @default.
• W2890826679 cites W2767004806 @default.
• W2890826679 cites W2771021162 @default.
• W2890826679 cites W2775055555 @default.
• W2890826679 cites W1968876953 @default.
• W2890826679 doi "https://doi.org/10.1021/acs.jpcc.8b06342" @default.
• W2890826679 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/6174421" @default.
• W2890826679 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/30319724" @default.
• W2890826679 hasPublicationYear "2018" @default.
• W2890826679 type Work @default.
• W2890826679 sameAs 2890826679 @default.
• W2890826679 citedByCount "29" @default.
• W2890826679 countsByYear W28908266792018 @default.
• W2890826679 countsByYear W28908266792019 @default.
• W2890826679 countsByYear W28908266792020 @default.
• W2890826679 countsByYear W28908266792021 @default.
• W2890826679 countsByYear W28908266792022 @default.
• W2890826679 countsByYear W28908266792023 @default.
• W2890826679 crossrefType "journal-article" @default.
• W2890826679 hasAuthorship W2890826679A5018346857 @default.
• W2890826679 hasAuthorship W2890826679A5032858345 @default.
• W2890826679 hasAuthorship W2890826679A5056823899 @default.
• W2890826679 hasAuthorship W2890826679A5064064108 @default.
• W2890826679 hasBestOaLocation W28908266791 @default.

• next