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- W2890868061 abstract "The influence of substrate temperature, composition of the working gas and DC and MF modes of reactive magnetron sputtering of an alloy 90%In + 10%Sn on the structural state, electrical resistance, transparency, and the band gap of the films ITO, deposited on glass substrates have been studied. The dependence of electron-optical properties of ITO films on the conditions of their production explains by the influence of the relaxation of internal stresses and crystallinity." @default.
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- W2890868061 date "2012-10-08" @default.
- W2890868061 modified "2023-10-18" @default.
- W2890868061 title "Вплив режиму магнетронного розпилення та складу реакційного газу на структуру і властивості плівок ITO" @default.
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