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• W2890869291 abstract "We have investigated the plasma-chemical anodic oxidation of single-crystal GaAs under the action of products of the non-self-sustained dc Townsend discharge in a 98%Ar + 2%O2 gas mixture. In the experiments, an original design of a plasma-chemical microreactor with two discharge gaps and a plane-parallel arrangement of electrodes is used. In one of the gaps of the device, a self-sustained Townsend discharge is excited. The stability of its spatially uniform state is ensured by the fact that one of the electrodes (cathode) has a high resistance. The non-self-sustained Townsend discharge in the second gap is controlled by the state of the first gap, which is provided by a proper design of the device. The plasma-chemical anodic oxidation of a semiconductor in the microreactor is studied at room temperature while changing the current density and processing time. The thickness of the oxide films was determined by spectral ellipsometry and transmission electron microscopy. In accordance with the obtained data, the microreactor ensures the formation of nanoscale oxide layers, whose thickness can be varied by changing the parameters of the process. The results are compared with some literature data on dc gas-discharge anodic oxidation of GaAs. We believe that the method can be used in other plasma-chemical processes where gas-discharge products interact with a solid target." @default.
• W2890869291 created "2018-09-27" @default.
• W2890869291 creator A5002749778 @default.
• W2890869291 creator A5008256866 @default.
• W2890869291 creator A5009906680 @default.
• W2890869291 creator A5045033563 @default.
• W2890869291 date "2018-09-11" @default.
• W2890869291 modified "2023-09-28" @default.
• W2890869291 title "GaAs oxidation with Townsend-discharge three-electrode microreactor" @default.
• W2890869291 cites W1832734220 @default.
• W2890869291 cites W1965585235 @default.
• W2890869291 cites W1974782349 @default.
• W2890869291 cites W1975015853 @default.
• W2890869291 cites W1994336113 @default.
• W2890869291 cites W2015610780 @default.
• W2890869291 cites W2016057317 @default.
• W2890869291 cites W2021181335 @default.
• W2890869291 cites W2024707364 @default.
• W2890869291 cites W2028496169 @default.
• W2890869291 cites W2034216536 @default.
• W2890869291 cites W2041298057 @default.
• W2890869291 cites W2050902772 @default.
• W2890869291 cites W2050972474 @default.
• W2890869291 cites W2067774383 @default.
• W2890869291 cites W2068550736 @default.
• W2890869291 cites W2087986974 @default.
• W2890869291 cites W2088750040 @default.
• W2890869291 cites W2105342876 @default.
• W2890869291 cites W2164351583 @default.
• W2890869291 cites W2315775607 @default.
• W2890869291 cites W2492528580 @default.
• W2890869291 cites W2607235720 @default.
• W2890869291 cites W2734710772 @default.
• W2890869291 cites W4253663642 @default.
• W2890869291 cites W2061645047 @default.
• W2890869291 doi "https://doi.org/10.1063/1.5042487" @default.
• W2890869291 hasPublicationYear "2018" @default.
• W2890869291 type Work @default.
• W2890869291 sameAs 2890869291 @default.
• W2890869291 citedByCount "4" @default.
• W2890869291 countsByYear W28908692912019 @default.
• W2890869291 countsByYear W28908692912020 @default.
• W2890869291 countsByYear W28908692912021 @default.
• W2890869291 crossrefType "journal-article" @default.
• W2890869291 hasAuthorship W2890869291A5002749778 @default.
• W2890869291 hasAuthorship W2890869291A5008256866 @default.
• W2890869291 hasAuthorship W2890869291A5009906680 @default.
• W2890869291 hasAuthorship W2890869291A5045033563 @default.
• W2890869291 hasConcept C108225325 @default.
• W2890869291 hasConcept C113196181 @default.
• W2890869291 hasConcept C121332964 @default.
• W2890869291 hasConcept C145148216 @default.
• W2890869291 hasConcept C147789679 @default.
• W2890869291 hasConcept C147831808 @default.
• W2890869291 hasConcept C161790260 @default.
• W2890869291 hasConcept C17525397 @default.
• W2890869291 hasConcept C178790620 @default.
• W2890869291 hasConcept C185592680 @default.
• W2890869291 hasConcept C192562407 @default.
• W2890869291 hasConcept C198291218 @default.
• W2890869291 hasConcept C2779656077 @default.
• W2890869291 hasConcept C43617362 @default.
• W2890869291 hasConcept C49040817 @default.
• W2890869291 hasConcept C49110097 @default.
• W2890869291 hasConcept C55493867 @default.
• W2890869291 hasConcept C62520636 @default.
• W2890869291 hasConcept C82706917 @default.
• W2890869291 hasConcept C89395315 @default.
• W2890869291 hasConceptScore W2890869291C108225325 @default.
• W2890869291 hasConceptScore W2890869291C113196181 @default.
• W2890869291 hasConceptScore W2890869291C121332964 @default.
• W2890869291 hasConceptScore W2890869291C145148216 @default.
• W2890869291 hasConceptScore W2890869291C147789679 @default.
• W2890869291 hasConceptScore W2890869291C147831808 @default.
• W2890869291 hasConceptScore W2890869291C161790260 @default.
• W2890869291 hasConceptScore W2890869291C17525397 @default.
• W2890869291 hasConceptScore W2890869291C178790620 @default.
• W2890869291 hasConceptScore W2890869291C185592680 @default.
• W2890869291 hasConceptScore W2890869291C192562407 @default.
• W2890869291 hasConceptScore W2890869291C198291218 @default.
• W2890869291 hasConceptScore W2890869291C2779656077 @default.
• W2890869291 hasConceptScore W2890869291C43617362 @default.
• W2890869291 hasConceptScore W2890869291C49040817 @default.
• W2890869291 hasConceptScore W2890869291C49110097 @default.
• W2890869291 hasConceptScore W2890869291C55493867 @default.
• W2890869291 hasConceptScore W2890869291C62520636 @default.
• W2890869291 hasConceptScore W2890869291C82706917 @default.
• W2890869291 hasConceptScore W2890869291C89395315 @default.
• W2890869291 hasFunder F4320334801 @default.
• W2890869291 hasIssue "10" @default.
• W2890869291 hasLocation W28908692911 @default.
• W2890869291 hasOpenAccess W2890869291 @default.
• W2890869291 hasPrimaryLocation W28908692911 @default.
• W2890869291 hasRelatedWork W1994038228 @default.
• W2890869291 hasRelatedWork W2145432850 @default.
• W2890869291 hasRelatedWork W2162243082 @default.
• W2890869291 hasRelatedWork W2324442246 @default.
• W2890869291 hasRelatedWork W2373870511 @default.
• W2890869291 hasRelatedWork W2564182305 @default.
• W2890869291 hasRelatedWork W2761167835 @default.

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