Matches in SemOpenAlex for { <https://semopenalex.org/work/W2890899727> ?p ?o ?g. }
Showing items 1 to 80 of
80
with 100 items per page.
- W2890899727 endingPage "13" @default.
- W2890899727 startingPage "11" @default.
- W2890899727 abstract "Low temperature anneal solutions are attractive for 7 nm CMOS transistor fabrication and beyond. This desire is driven by the introduction of new materials, novel integration flows and alternate device architectures that are incompatible with high temperature anneal solutions. Recently, microwave anneal has emerged as a potential approach for low temperature processing. In this paper, we demonstrate an alternate low temperature anneal run path using microwave anneal for Titanium silicidation. Microwave annealed split had matched or better contact resistivity and device performance compared to mSec annealed split. HRTEM of both anneal processes revealed comparable silicidation. Densification of FCVD grown oxide film using low temperature microwave anneal is also exhibited. The wet etch rate ratio (WERR) achieved by the low temperature microwave annealed split was comparable to that attained in high temperature steam oxidation process. This low temperature process could be highly useful in the fabrication of devices that use materials that suffer from unwanted diffusion, oxidization, and defects resulting from high temperature anneals." @default.
- W2890899727 created "2018-09-27" @default.
- W2890899727 creator A5008576475 @default.
- W2890899727 creator A5010399539 @default.
- W2890899727 creator A5013775154 @default.
- W2890899727 creator A5023324549 @default.
- W2890899727 creator A5033174249 @default.
- W2890899727 creator A5033219191 @default.
- W2890899727 creator A5054125717 @default.
- W2890899727 creator A5054581873 @default.
- W2890899727 creator A5079191557 @default.
- W2890899727 creator A5080102289 @default.
- W2890899727 date "2018-07-20" @default.
- W2890899727 modified "2023-09-24" @default.
- W2890899727 title "Low Temperature Microwave Anneal in FinFET Fabrication" @default.
- W2890899727 doi "https://doi.org/10.1149/08608.0011ecst" @default.
- W2890899727 hasPublicationYear "2018" @default.
- W2890899727 type Work @default.
- W2890899727 sameAs 2890899727 @default.
- W2890899727 citedByCount "0" @default.
- W2890899727 crossrefType "journal-article" @default.
- W2890899727 hasAuthorship W2890899727A5008576475 @default.
- W2890899727 hasAuthorship W2890899727A5010399539 @default.
- W2890899727 hasAuthorship W2890899727A5013775154 @default.
- W2890899727 hasAuthorship W2890899727A5023324549 @default.
- W2890899727 hasAuthorship W2890899727A5033174249 @default.
- W2890899727 hasAuthorship W2890899727A5033219191 @default.
- W2890899727 hasAuthorship W2890899727A5054125717 @default.
- W2890899727 hasAuthorship W2890899727A5054581873 @default.
- W2890899727 hasAuthorship W2890899727A5079191557 @default.
- W2890899727 hasAuthorship W2890899727A5080102289 @default.
- W2890899727 hasConcept C121332964 @default.
- W2890899727 hasConcept C136525101 @default.
- W2890899727 hasConcept C142724271 @default.
- W2890899727 hasConcept C146088050 @default.
- W2890899727 hasConcept C159985019 @default.
- W2890899727 hasConcept C161368742 @default.
- W2890899727 hasConcept C171250308 @default.
- W2890899727 hasConcept C192562407 @default.
- W2890899727 hasConcept C204787440 @default.
- W2890899727 hasConcept C2777855556 @default.
- W2890899727 hasConcept C44838205 @default.
- W2890899727 hasConcept C49040817 @default.
- W2890899727 hasConcept C62520636 @default.
- W2890899727 hasConcept C71924100 @default.
- W2890899727 hasConceptScore W2890899727C121332964 @default.
- W2890899727 hasConceptScore W2890899727C136525101 @default.
- W2890899727 hasConceptScore W2890899727C142724271 @default.
- W2890899727 hasConceptScore W2890899727C146088050 @default.
- W2890899727 hasConceptScore W2890899727C159985019 @default.
- W2890899727 hasConceptScore W2890899727C161368742 @default.
- W2890899727 hasConceptScore W2890899727C171250308 @default.
- W2890899727 hasConceptScore W2890899727C192562407 @default.
- W2890899727 hasConceptScore W2890899727C204787440 @default.
- W2890899727 hasConceptScore W2890899727C2777855556 @default.
- W2890899727 hasConceptScore W2890899727C44838205 @default.
- W2890899727 hasConceptScore W2890899727C49040817 @default.
- W2890899727 hasConceptScore W2890899727C62520636 @default.
- W2890899727 hasConceptScore W2890899727C71924100 @default.
- W2890899727 hasIssue "8" @default.
- W2890899727 hasLocation W28908997271 @default.
- W2890899727 hasOpenAccess W2890899727 @default.
- W2890899727 hasPrimaryLocation W28908997271 @default.
- W2890899727 hasRelatedWork W1982708586 @default.
- W2890899727 hasRelatedWork W2010778943 @default.
- W2890899727 hasRelatedWork W2054243438 @default.
- W2890899727 hasRelatedWork W2505733790 @default.
- W2890899727 hasRelatedWork W2536376112 @default.
- W2890899727 hasRelatedWork W2739323857 @default.
- W2890899727 hasRelatedWork W2745790210 @default.
- W2890899727 hasRelatedWork W3014937519 @default.
- W2890899727 hasRelatedWork W3204749931 @default.
- W2890899727 hasRelatedWork W4318821900 @default.
- W2890899727 hasVolume "86" @default.
- W2890899727 isParatext "false" @default.
- W2890899727 isRetracted "false" @default.
- W2890899727 magId "2890899727" @default.
- W2890899727 workType "article" @default.