FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2890916978> ?p ?o ?g. }

• W2890916978 endingPage "268" @default.
• W2890916978 startingPage "259" @default.
• W2890916978 abstract "This paper reports on the characteristic behaviour of bistable MEMS membranes before, during and after switching between the two ground states. For this purpose, silicon membranes with a diameter in the range of 300–800 μm and a thickness in the range of 2–5 μm were investigated. To achieve bistability, hydrogenated amorphous silicon carbide layers with different thicknesses in the range of 50 nm–400 nm were deposited on the silicon membranes using an inductively-coupled plasma-enhanced chemical vapour deposition process. With this bi-layered approach, an initial deflection of 2.5–8.1 μm was achieved which results in a total switching displacement of 5–16.2 μm A setup for bulge testing in combination with a Whitelight interferometer was used to analyse the membrane behaviour before the bi-stable switching. The pressure difference required to initiate switching between the ground states was in the range of 20–320 mbar. Both parameters (i.e. static deflection and switching pressure) are in excellent agreement with an analytical model. When increasing the pressure the membranes deflect up to 2.4 μm before switching, strongly depending on the diameter of the membranes. The dynamic measurements with the laser Doppler vibrometer showed switching times in the range of 5–20 μs, maximum velocities in the range of 1.5 to 4.3 m∙s−1 and high maximum accelerations between 2 to 11∙106 m∙s-2 depending on membrane properties such as diameter, thickness and mechanical stress. Finally, with fast Fourier transform analyses of the measured velocity signal characteristics Eigenmodes of the membrane are determined dominating the oscillation behaviour after switching, thus indicating approaches for effective damping with integrated actuators." @default.
• W2890916978 created "2018-09-27" @default.
• W2890916978 creator A5011957337 @default.
• W2890916978 creator A5017133878 @default.
• W2890916978 creator A5024404380 @default.
• W2890916978 date "2018-10-01" @default.
• W2890916978 modified "2023-10-02" @default.
• W2890916978 title "Static and dynamic performance of bistable MEMS membranes" @default.
• W2890916978 cites W1965585170 @default.
• W2890916978 cites W2001341936 @default.
• W2890916978 cites W2028711086 @default.
• W2890916978 cites W2028771680 @default.
• W2890916978 cites W2034694725 @default.
• W2890916978 cites W2038667420 @default.
• W2890916978 cites W2041065548 @default.
• W2890916978 cites W2041924745 @default.
• W2890916978 cites W2042986297 @default.
• W2890916978 cites W2050867206 @default.
• W2890916978 cites W2082156227 @default.
• W2890916978 cites W2090114470 @default.
• W2890916978 cites W2093206606 @default.
• W2890916978 cites W2094466787 @default.
• W2890916978 cites W2099541542 @default.
• W2890916978 cites W2116461868 @default.
• W2890916978 cites W2118114005 @default.
• W2890916978 cites W2122109263 @default.
• W2890916978 cites W2129505804 @default.
• W2890916978 cites W2151231767 @default.
• W2890916978 cites W2151919982 @default.
• W2890916978 cites W2157763436 @default.
• W2890916978 cites W2166225675 @default.
• W2890916978 cites W2347203362 @default.
• W2890916978 cites W2405663042 @default.
• W2890916978 cites W2411143672 @default.
• W2890916978 doi "https://doi.org/10.1016/j.sna.2018.09.038" @default.
• W2890916978 hasPublicationYear "2018" @default.
• W2890916978 type Work @default.
• W2890916978 sameAs 2890916978 @default.
• W2890916978 citedByCount "16" @default.
• W2890916978 countsByYear W28909169782019 @default.
• W2890916978 countsByYear W28909169782020 @default.
• W2890916978 countsByYear W28909169782021 @default.
• W2890916978 countsByYear W28909169782022 @default.
• W2890916978 countsByYear W28909169782023 @default.
• W2890916978 crossrefType "journal-article" @default.
• W2890916978 hasAuthorship W2890916978A5011957337 @default.
• W2890916978 hasAuthorship W2890916978A5017133878 @default.
• W2890916978 hasAuthorship W2890916978A5024404380 @default.
• W2890916978 hasConcept C113196181 @default.
• W2890916978 hasConcept C120665830 @default.
• W2890916978 hasConcept C121332964 @default.
• W2890916978 hasConcept C166689943 @default.
• W2890916978 hasConcept C185592680 @default.
• W2890916978 hasConcept C192562407 @default.
• W2890916978 hasConcept C2777431650 @default.
• W2890916978 hasConcept C2781355719 @default.
• W2890916978 hasConcept C37977207 @default.
• W2890916978 hasConcept C41625074 @default.
• W2890916978 hasConcept C43617362 @default.
• W2890916978 hasConcept C49040817 @default.
• W2890916978 hasConcept C544956773 @default.
• W2890916978 hasConcept C55493867 @default.
• W2890916978 hasConcept C56052488 @default.
• W2890916978 hasConcept C6260449 @default.
• W2890916978 hasConcept C8010536 @default.
• W2890916978 hasConcept C927094 @default.
• W2890916978 hasConcept C96199931 @default.
• W2890916978 hasConcept C97292510 @default.
• W2890916978 hasConceptScore W2890916978C113196181 @default.
• W2890916978 hasConceptScore W2890916978C120665830 @default.
• W2890916978 hasConceptScore W2890916978C121332964 @default.
• W2890916978 hasConceptScore W2890916978C166689943 @default.
• W2890916978 hasConceptScore W2890916978C185592680 @default.
• W2890916978 hasConceptScore W2890916978C192562407 @default.
• W2890916978 hasConceptScore W2890916978C2777431650 @default.
• W2890916978 hasConceptScore W2890916978C2781355719 @default.
• W2890916978 hasConceptScore W2890916978C37977207 @default.
• W2890916978 hasConceptScore W2890916978C41625074 @default.
• W2890916978 hasConceptScore W2890916978C43617362 @default.
• W2890916978 hasConceptScore W2890916978C49040817 @default.
• W2890916978 hasConceptScore W2890916978C544956773 @default.
• W2890916978 hasConceptScore W2890916978C55493867 @default.
• W2890916978 hasConceptScore W2890916978C56052488 @default.
• W2890916978 hasConceptScore W2890916978C6260449 @default.
• W2890916978 hasConceptScore W2890916978C8010536 @default.
• W2890916978 hasConceptScore W2890916978C927094 @default.
• W2890916978 hasConceptScore W2890916978C96199931 @default.
• W2890916978 hasConceptScore W2890916978C97292510 @default.
• W2890916978 hasFunder F4320326050 @default.
• W2890916978 hasLocation W28909169781 @default.
• W2890916978 hasOpenAccess W2890916978 @default.
• W2890916978 hasPrimaryLocation W28909169781 @default.
• W2890916978 hasRelatedWork W1990165374 @default.
• W2890916978 hasRelatedWork W1991974972 @default.
• W2890916978 hasRelatedWork W2001228859 @default.
• W2890916978 hasRelatedWork W2017697939 @default.
• W2890916978 hasRelatedWork W2046527338 @default.
• W2890916978 hasRelatedWork W2047089117 @default.

• next