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- W2890951227 endingPage "38" @default.
- W2890951227 startingPage "31" @default.
- W2890951227 abstract "We studied the ferroelectricity and the leakage current (J) properties of two types of the MFM capacitors such as the TiN/ZrO2/HfxZr1−xO2/ZrO2/TiN capacitor (D-ZrO2) with the ZrO2 nucleation layers, comparing to the TiN/HfxZr1−xO2/TiN capacitor (D-TiN) with the TiN stressor layers. The larger ferroelectric phase ratio was achieved by the epitaxial like grain growth of the HfxZr1−xO2 film on the surface of the top- and bottom-ZrO2 nucleation layers. Thus, the larger remanent polarization (2Pr = 29 µC/cm2) of D-ZrO2 was obtained compared to that (24 µC/cm2) of D-TiN. Moreover, the J value of D-ZrO2 was approximately one order of magnitude lower than that of D-TiN. Therefore, these results suggest that the superior ferroelectricity of HZO film can be obtained using the ZrO2 nucleation technique instead of the TiN stressor technique." @default.
- W2890951227 created "2018-09-27" @default.
- W2890951227 creator A5004609434 @default.
- W2890951227 creator A5028299707 @default.
- W2890951227 creator A5046107590 @default.
- W2890951227 creator A5048474773 @default.
- W2890951227 creator A5070528860 @default.
- W2890951227 creator A5079576642 @default.
- W2890951227 creator A5088571750 @default.
- W2890951227 creator A5091907009 @default.
- W2890951227 date "2018-07-20" @default.
- W2890951227 modified "2023-10-03" @default.
- W2890951227 title "Ferroelectricity of Hf<sub>x</sub>Zr<sub>1−x</sub>O<sub>2</sub> Thin Films Fabricated Using TiN Stressor and ZrO<sub>2</sub> Nucleation Techniques" @default.
- W2890951227 doi "https://doi.org/10.1149/08606.0031ecst" @default.
- W2890951227 hasPublicationYear "2018" @default.
- W2890951227 type Work @default.
- W2890951227 sameAs 2890951227 @default.
- W2890951227 citedByCount "7" @default.
- W2890951227 countsByYear W28909512272019 @default.
- W2890951227 countsByYear W28909512272020 @default.
- W2890951227 countsByYear W28909512272023 @default.
- W2890951227 crossrefType "journal-article" @default.
- W2890951227 hasAuthorship W2890951227A5004609434 @default.
- W2890951227 hasAuthorship W2890951227A5028299707 @default.
- W2890951227 hasAuthorship W2890951227A5046107590 @default.
- W2890951227 hasAuthorship W2890951227A5048474773 @default.
- W2890951227 hasAuthorship W2890951227A5070528860 @default.
- W2890951227 hasAuthorship W2890951227A5079576642 @default.
- W2890951227 hasAuthorship W2890951227A5088571750 @default.
- W2890951227 hasAuthorship W2890951227A5091907009 @default.
- W2890951227 hasConcept C110738630 @default.
- W2890951227 hasConcept C113196181 @default.
- W2890951227 hasConcept C133386390 @default.
- W2890951227 hasConcept C159985019 @default.
- W2890951227 hasConcept C178790620 @default.
- W2890951227 hasConcept C185592680 @default.
- W2890951227 hasConcept C191897082 @default.
- W2890951227 hasConcept C192562407 @default.
- W2890951227 hasConcept C2779227376 @default.
- W2890951227 hasConcept C43617362 @default.
- W2890951227 hasConcept C49040817 @default.
- W2890951227 hasConcept C525849907 @default.
- W2890951227 hasConcept C61048295 @default.
- W2890951227 hasConcept C79090758 @default.
- W2890951227 hasConceptScore W2890951227C110738630 @default.
- W2890951227 hasConceptScore W2890951227C113196181 @default.
- W2890951227 hasConceptScore W2890951227C133386390 @default.
- W2890951227 hasConceptScore W2890951227C159985019 @default.
- W2890951227 hasConceptScore W2890951227C178790620 @default.
- W2890951227 hasConceptScore W2890951227C185592680 @default.
- W2890951227 hasConceptScore W2890951227C191897082 @default.
- W2890951227 hasConceptScore W2890951227C192562407 @default.
- W2890951227 hasConceptScore W2890951227C2779227376 @default.
- W2890951227 hasConceptScore W2890951227C43617362 @default.
- W2890951227 hasConceptScore W2890951227C49040817 @default.
- W2890951227 hasConceptScore W2890951227C525849907 @default.
- W2890951227 hasConceptScore W2890951227C61048295 @default.
- W2890951227 hasConceptScore W2890951227C79090758 @default.
- W2890951227 hasIssue "6" @default.
- W2890951227 hasLocation W28909512271 @default.
- W2890951227 hasOpenAccess W2890951227 @default.
- W2890951227 hasPrimaryLocation W28909512271 @default.
- W2890951227 hasRelatedWork W1991793670 @default.
- W2890951227 hasRelatedWork W2292872179 @default.
- W2890951227 hasRelatedWork W2363148876 @default.
- W2890951227 hasRelatedWork W2370242288 @default.
- W2890951227 hasRelatedWork W2883892660 @default.
- W2890951227 hasRelatedWork W2914147064 @default.
- W2890951227 hasRelatedWork W3201544005 @default.
- W2890951227 hasRelatedWork W4225379450 @default.
- W2890951227 hasRelatedWork W4230065958 @default.
- W2890951227 hasRelatedWork W4292340386 @default.
- W2890951227 hasVolume "86" @default.
- W2890951227 isParatext "false" @default.
- W2890951227 isRetracted "false" @default.
- W2890951227 magId "2890951227" @default.
- W2890951227 workType "article" @default.