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- W2890999323 abstract "Displacement sensing at the nanoscale is required in many applications, including accelerometry, mass sensing and atomic force microscopy. Miniaturization of the sensing elements and integration of the read-out is key in achieving low cost, high resolution and high speed. Here, we present a novel integrated nano-opto-electro-mechanical device which potentially has subnanometer resolution for displacement sensing. The proposed device is a waveguide-coupled, micron-sized, double membrane photonic crystal cavity with integrated electro-optical read-out on a single chip" @default.
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- W2890999323 date "2018-07-01" @default.
- W2890999323 modified "2023-09-26" @default.
- W2890999323 title "Integrated Optomechanical Displacement Sensor Based on a Photonic Crystal Cavity" @default.
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- W2890999323 doi "https://doi.org/10.1109/omn.2018.8454635" @default.
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