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- W2891055371 endingPage "159" @default.
- W2891055371 startingPage "147" @default.
- W2891055371 abstract "Atomic layer deposition (ALD) is a thin film deposition technique currently used in various nanofabrication processes for microelectronic applications. The ability to coat high aspect ratio structures with a wide range of materials, the excellent conformality, and the exquisite thickness control have made ALD an essential tool for the fabrication of many devices, including biosensors. This mini-review aims to provide a summary of the different ways ALD has been used to prepare biosensor devices. The materials that have been deposited by ALD, the use of the ALD layers prepared and the different types of biosensors fabricated are presented. A selected list of studies will be used to illustrate how the ALD route can be implemented to improve the operational performance of biosensors. This work comprehensively shows the benefits of ALD and its application in various facets of biosensing and will help in exploiting the numerous prospects of this emerging and growing field." @default.
- W2891055371 created "2018-09-27" @default.
- W2891055371 creator A5035420812 @default.
- W2891055371 creator A5046375392 @default.
- W2891055371 creator A5058941228 @default.
- W2891055371 creator A5059030543 @default.
- W2891055371 creator A5090728728 @default.
- W2891055371 date "2018-12-01" @default.
- W2891055371 modified "2023-10-18" @default.
- W2891055371 title "Atomic layer deposition for biosensing applications" @default.
- W2891055371 cites W1497635265 @default.
- W2891055371 cites W1512740549 @default.
- W2891055371 cites W1521262555 @default.
- W2891055371 cites W1674526341 @default.
- W2891055371 cites W1910591632 @default.
- W2891055371 cites W1964018049 @default.
- W2891055371 cites W1966323177 @default.
- W2891055371 cites W1967227916 @default.
- W2891055371 cites W1967749052 @default.
- W2891055371 cites W1969141180 @default.
- W2891055371 cites W1971328361 @default.
- W2891055371 cites W1972539176 @default.
- W2891055371 cites W1977242328 @default.
- W2891055371 cites W1983858760 @default.
- W2891055371 cites W1984139105 @default.
- W2891055371 cites W1986633864 @default.
- W2891055371 cites W1991221892 @default.
- W2891055371 cites W1992761595 @default.
- W2891055371 cites W1994495097 @default.
- W2891055371 cites W1995987129 @default.
- W2891055371 cites W1997437594 @default.
- W2891055371 cites W1998534931 @default.
- W2891055371 cites W2001610605 @default.
- W2891055371 cites W2004668025 @default.
- W2891055371 cites W2004807283 @default.
- W2891055371 cites W2006899770 @default.
- W2891055371 cites W2007592439 @default.
- W2891055371 cites W2008560367 @default.
- W2891055371 cites W2009886994 @default.
- W2891055371 cites W2010010738 @default.
- W2891055371 cites W2015085424 @default.
- W2891055371 cites W2017377090 @default.
- W2891055371 cites W2019691449 @default.
- W2891055371 cites W2023603575 @default.
- W2891055371 cites W2025172217 @default.
- W2891055371 cites W2025706012 @default.
- W2891055371 cites W2031977663 @default.
- W2891055371 cites W2032342948 @default.
- W2891055371 cites W2032681615 @default.
- W2891055371 cites W2033554694 @default.
- W2891055371 cites W2034687443 @default.
- W2891055371 cites W2034888746 @default.
- W2891055371 cites W2037652806 @default.
- W2891055371 cites W2040975493 @default.
- W2891055371 cites W2041841805 @default.
- W2891055371 cites W2042687914 @default.
- W2891055371 cites W2043517244 @default.
- W2891055371 cites W2044666397 @default.
- W2891055371 cites W2054364096 @default.
- W2891055371 cites W2066649429 @default.
- W2891055371 cites W2066951856 @default.
- W2891055371 cites W2069497154 @default.
- W2891055371 cites W2076346726 @default.
- W2891055371 cites W2077770884 @default.
- W2891055371 cites W2078723411 @default.
- W2891055371 cites W2082040103 @default.
- W2891055371 cites W2088073071 @default.
- W2891055371 cites W2088428039 @default.
- W2891055371 cites W2089461876 @default.
- W2891055371 cites W2089747257 @default.
- W2891055371 cites W2090309304 @default.
- W2891055371 cites W2094163809 @default.
- W2891055371 cites W2101049053 @default.
- W2891055371 cites W2101565116 @default.
- W2891055371 cites W2104055806 @default.
- W2891055371 cites W2104186298 @default.
- W2891055371 cites W2104548466 @default.
- W2891055371 cites W2106733023 @default.
- W2891055371 cites W2114393696 @default.
- W2891055371 cites W2120215354 @default.
- W2891055371 cites W2120491593 @default.
- W2891055371 cites W2121348951 @default.
- W2891055371 cites W2122271644 @default.
- W2891055371 cites W2127407003 @default.
- W2891055371 cites W2131198041 @default.
- W2891055371 cites W2133628791 @default.
- W2891055371 cites W2140082254 @default.
- W2891055371 cites W2141051064 @default.
- W2891055371 cites W2145578865 @default.
- W2891055371 cites W2147732359 @default.
- W2891055371 cites W2148806182 @default.
- W2891055371 cites W2148963282 @default.
- W2891055371 cites W2151747661 @default.
- W2891055371 cites W2151949892 @default.
- W2891055371 cites W2158932701 @default.
- W2891055371 cites W2158998816 @default.
- W2891055371 cites W2160905010 @default.
- W2891055371 cites W2164029323 @default.