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- W2891113636 abstract "In this work we reported a work flow of de-layering method by using glancing angle FIB milling for IC failure analysis. This method doesn't require cleaving the sample cross-section which increases risk of damaging target structure. Instead, a combination of precise laser ablation and FIB milling is used to create a large viewing window before glancing angle FIB milling. Our results demonstrated that the method can become useful alternative of conventional mechanical and/or chemical polishing and were successfully applied in several case studies for analyzing embedded defect or passive voltage contrast (PVC) fault isolation." @default.
- W2891113636 created "2018-09-27" @default.
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- W2891113636 date "2018-07-01" @default.
- W2891113636 modified "2023-10-16" @default.
- W2891113636 title "Glancing Angle FIB De-layering for Embedded Defect and PVC Fault Isolation Analysis" @default.
- W2891113636 cites W2003794390 @default.
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- W2891113636 doi "https://doi.org/10.1109/ipfa.2018.8452503" @default.
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