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- W2891138504 abstract "Metal-Insulator-Metal (MIM) capacitor is one of the most common use passive component nowadays on semiconductor device. Unfortunately, its floating characteristic in semiconductor device make it difficult to further fault isolate to single faulty MIM capacitor within a group of MIM capacitor after remove the metal connection layer. A method to combine passive voltage contrast (PVC) analysis technique, focus ion beam (FIB) and platinum (Pt) coater is used to further localize the exact fail site on the defect MIM capacitor which will be presented in this paper." @default.
- W2891138504 created "2018-09-27" @default.
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- W2891138504 date "2018-07-01" @default.
- W2891138504 modified "2023-10-16" @default.
- W2891138504 title "In-situ FIB PVC to Speed up Fault Isolation of Floating Metal-Insulator-Metal Capacitor Failure" @default.
- W2891138504 doi "https://doi.org/10.1109/ipfa.2018.8452573" @default.
- W2891138504 hasPublicationYear "2018" @default.
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