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- W2891367787 abstract "In synchrotron radiation facilities, soft X-ray nanofocusing with mirrors remains a hurdle due to difficulties in mirror fabrication. We have been researching the use of ellipsoidal mirrors for soft X-ray nanofocusing. Information on the wavefront errors of focused beams is helpful for improving the focusing system. This study presents ptychographic wavefront measurements for a nanofocusing system with an ellipsoidal mirror. We developed a ptychography program and performed several simulations at 300 eV to investigate the theoretical accuracy of the wavefront measurements. The simulation results indicate that wavefront measurements with high accuracy are possible." @default.
- W2891367787 created "2018-09-27" @default.
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- W2891367787 date "2018-09-18" @default.
- W2891367787 modified "2023-10-16" @default.
- W2891367787 title "Ptychography simulations for precisely measuring wavefront profiles in soft x-ray focusing system based on ellipsoidal mirror" @default.
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- W2891367787 doi "https://doi.org/10.1117/12.2320961" @default.
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