Matches in SemOpenAlex for { <https://semopenalex.org/work/W2891372480> ?p ?o ?g. }
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- W2891372480 endingPage "xi" @default.
- W2891372480 startingPage "xi" @default.
- W2891372480 abstract "The various crystallographic orientations in semiconductors as ZnO exhibit different resistivity under the ion beam irradiation/implantation. Study of the various crystallographic orientations is mandatory for nano-structured semiconductor system development. This paper reports on the implantation damage build-up, structural modification and Er dopant position in a-plane and m-plane ZnO implanted with Er+ 400 keV ions at the ion fluences 5 × 1014, 2.5 × 1015, 5 × 1015 cm−2 and subsequently annealed at 600 °C in O2 atmosphere using Rutherford Back-Scattering spectrometry (RBS) in channelling mode as well as using Raman spectroscopy. Strongly suppressed surface damage formation was observed in both crystallographic orientations compared to the deep damage growth with the increased ion implantation fluence. More progressive damage accumulation appeared in m-plane ZnO compared to a-plane ZnO. Simultaneously, the strong Er out-diffusion depth profile in m-plane ZnO accompanied by the damage accumulation at the surface was observed after the annealing. Contrary, the surface recovery accompanied by Er concentration depth profiles keeping a normal distribution with a small maximum shift to the surface was observed in a-plane ZnO. Different structure recovery and Er behaviour was evidenced in a-plane and m-plane ZnO by RBS-C, moreover Raman spectroscopy proved a lower damage at higher ion fluences introduced in a-plane ZnO compared to m-plane. The structure modifications were discussed in connection with a damage accumulation and Er concentration depth profile shape in various ZnO crystallographic orientations in as-implanted and as-annealed samples." @default.
- W2891372480 created "2018-09-27" @default.
- W2891372480 creator A5076335875 @default.
- W2891372480 date "2018-11-01" @default.
- W2891372480 modified "2023-09-27" @default.
- W2891372480 title "Invited Issue in Honor of Founding Editor Siegbahn" @default.
- W2891372480 doi "https://doi.org/10.1016/j.nima.2018.09.016" @default.
- W2891372480 hasPublicationYear "2018" @default.
- W2891372480 type Work @default.
- W2891372480 sameAs 2891372480 @default.
- W2891372480 citedByCount "0" @default.
- W2891372480 crossrefType "journal-article" @default.
- W2891372480 hasAuthorship W2891372480A5076335875 @default.
- W2891372480 hasConcept C108225325 @default.
- W2891372480 hasConcept C111337013 @default.
- W2891372480 hasConcept C113196181 @default.
- W2891372480 hasConcept C120665830 @default.
- W2891372480 hasConcept C121332964 @default.
- W2891372480 hasConcept C145148216 @default.
- W2891372480 hasConcept C171250308 @default.
- W2891372480 hasConcept C178790620 @default.
- W2891372480 hasConcept C185544564 @default.
- W2891372480 hasConcept C185592680 @default.
- W2891372480 hasConcept C19067145 @default.
- W2891372480 hasConcept C191897082 @default.
- W2891372480 hasConcept C191952053 @default.
- W2891372480 hasConcept C192562407 @default.
- W2891372480 hasConcept C22078206 @default.
- W2891372480 hasConcept C2777855556 @default.
- W2891372480 hasConcept C2780547777 @default.
- W2891372480 hasConcept C2781028716 @default.
- W2891372480 hasConcept C40003534 @default.
- W2891372480 hasConcept C41823505 @default.
- W2891372480 hasConcept C43617362 @default.
- W2891372480 hasConcept C49040817 @default.
- W2891372480 hasConcept C57863236 @default.
- W2891372480 hasConcept C8010536 @default.
- W2891372480 hasConceptScore W2891372480C108225325 @default.
- W2891372480 hasConceptScore W2891372480C111337013 @default.
- W2891372480 hasConceptScore W2891372480C113196181 @default.
- W2891372480 hasConceptScore W2891372480C120665830 @default.
- W2891372480 hasConceptScore W2891372480C121332964 @default.
- W2891372480 hasConceptScore W2891372480C145148216 @default.
- W2891372480 hasConceptScore W2891372480C171250308 @default.
- W2891372480 hasConceptScore W2891372480C178790620 @default.
- W2891372480 hasConceptScore W2891372480C185544564 @default.
- W2891372480 hasConceptScore W2891372480C185592680 @default.
- W2891372480 hasConceptScore W2891372480C19067145 @default.
- W2891372480 hasConceptScore W2891372480C191897082 @default.
- W2891372480 hasConceptScore W2891372480C191952053 @default.
- W2891372480 hasConceptScore W2891372480C192562407 @default.
- W2891372480 hasConceptScore W2891372480C22078206 @default.
- W2891372480 hasConceptScore W2891372480C2777855556 @default.
- W2891372480 hasConceptScore W2891372480C2780547777 @default.
- W2891372480 hasConceptScore W2891372480C2781028716 @default.
- W2891372480 hasConceptScore W2891372480C40003534 @default.
- W2891372480 hasConceptScore W2891372480C41823505 @default.
- W2891372480 hasConceptScore W2891372480C43617362 @default.
- W2891372480 hasConceptScore W2891372480C49040817 @default.
- W2891372480 hasConceptScore W2891372480C57863236 @default.
- W2891372480 hasConceptScore W2891372480C8010536 @default.
- W2891372480 hasLocation W28913724801 @default.
- W2891372480 hasOpenAccess W2891372480 @default.
- W2891372480 hasPrimaryLocation W28913724801 @default.
- W2891372480 hasRelatedWork W1984315097 @default.
- W2891372480 hasRelatedWork W1985873695 @default.
- W2891372480 hasRelatedWork W2010084115 @default.
- W2891372480 hasRelatedWork W2068836306 @default.
- W2891372480 hasRelatedWork W2076021990 @default.
- W2891372480 hasRelatedWork W2094423372 @default.
- W2891372480 hasRelatedWork W2289214184 @default.
- W2891372480 hasRelatedWork W2790868607 @default.
- W2891372480 hasRelatedWork W2792544402 @default.
- W2891372480 hasRelatedWork W2089189484 @default.
- W2891372480 hasVolume "907" @default.
- W2891372480 isParatext "false" @default.
- W2891372480 isRetracted "false" @default.
- W2891372480 magId "2891372480" @default.
- W2891372480 workType "article" @default.