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• W2891388553 abstract "Photonic sensors that operate in the mid-infrared spectral range are an emerging field for photonic microsystems. In this paper, we present a photonic gas sensor concept based on silicon waveguides using infrared evanescent field absorption. The waveguides were specifically designed for CO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> sensing at a wavelength of λ = 4.26μm as possible application for the proposed sensor platform. The waveguide cross section as well as the substructure were investigated using finite-element simulations and the devised structures were fabricated using mass fabrication processes exclusively. In order to evaluate the potential for long interaction path lengths using polysilicon strip waveguides, a study on the intrinsic losses of polysilicon waveguides was conducted. The lowest intrinsic damping that was obtained for polysilicon strip waveguides was 3.98 dB/cm. Furthermore, the sensing capability of the devised waveguides was tested with quantitative CO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> measurements down to a concentration of 500 ppm CO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> . From the quantitative measurements, the evanescent field ratio was estimated and was in the range between η = 14%-16%." @default.
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• W2891388553 date "2018-10-01" @default.
• W2891388553 modified "2023-10-05" @default.
• W2891388553 title "Characterization of Evanescent Field Gas Sensor Structures Based on Silicon Photonics" @default.
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• W2891388553 doi "https://doi.org/10.1109/jphot.2018.2866628" @default.
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