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• W2891541424 abstract "A floating emissive probe has been used to obtain the spatial electron temperature ( T e ) profile in a 13.56 MHz parallel plate capacitive coupled plasma. The effect of an external transverse magnetic field and pressure on the electron temperature profile has been discussed. In the un-magnetised case, the bulk region of the plasma has a uniform T e . Upon application of the magnetic field, the T e profile becomes non-uniform and skewed.  With increase in pressure, there is an overall reduction in electron temperature. The regions adjacent to the electrodes witnessed a higher temperature than the bulk for both cases. The emissive probe results have also been compared with particle-in-cell simulation results for the un-magnetised case." @default.
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• W2891541424 date "2018-07-09" @default.
• W2891541424 modified "2023-09-26" @default.
• W2891541424 title "Spatial Temperature Profile in a Magnetised Capacitively Coupled Discharge" @default.
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• W2891541424 hasPublicationYear "2018" @default.
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