Matches in SemOpenAlex for { <https://semopenalex.org/work/W2891684743> ?p ?o ?g. }
Showing items 1 to 67 of
67
with 100 items per page.
- W2891684743 abstract "For advanced technology nodes, the patterning of integrated circuits requires not only a very good control of critical dimensions but also a very accurate control of the alignment between layers. These two factors combine to define the metric of inter-layer edge placement error (EPE) that quantifies the quality of the pattern placement critical for yield. In this work, we consider the inter-layer EPE between a contact layer with respect to a poly layer measured with SEM contours. Inter-layer EPE was measured across wafer for various critical features to assess the importance of dimensional and overlay variability. Area of overlap between contact and poly as well as contact centroid distribution were considered to further characterize the interaction between poly and contact patterns." @default.
- W2891684743 created "2018-09-27" @default.
- W2891684743 creator A5027256215 @default.
- W2891684743 creator A5052328930 @default.
- W2891684743 creator A5091137781 @default.
- W2891684743 date "2018-09-19" @default.
- W2891684743 modified "2023-10-16" @default.
- W2891684743 title "Measuring inter-layer edge placement error with SEM contours" @default.
- W2891684743 cites W2050357188 @default.
- W2891684743 cites W2315462354 @default.
- W2891684743 doi "https://doi.org/10.1117/12.2326529" @default.
- W2891684743 hasPublicationYear "2018" @default.
- W2891684743 type Work @default.
- W2891684743 sameAs 2891684743 @default.
- W2891684743 citedByCount "1" @default.
- W2891684743 countsByYear W28916847432022 @default.
- W2891684743 crossrefType "proceedings-article" @default.
- W2891684743 hasAuthorship W2891684743A5027256215 @default.
- W2891684743 hasAuthorship W2891684743A5052328930 @default.
- W2891684743 hasAuthorship W2891684743A5091137781 @default.
- W2891684743 hasConcept C127413603 @default.
- W2891684743 hasConcept C136085584 @default.
- W2891684743 hasConcept C146599234 @default.
- W2891684743 hasConcept C154945302 @default.
- W2891684743 hasConcept C160671074 @default.
- W2891684743 hasConcept C162307627 @default.
- W2891684743 hasConcept C171250308 @default.
- W2891684743 hasConcept C176217482 @default.
- W2891684743 hasConcept C192562407 @default.
- W2891684743 hasConcept C199360897 @default.
- W2891684743 hasConcept C21547014 @default.
- W2891684743 hasConcept C24326235 @default.
- W2891684743 hasConcept C2779227376 @default.
- W2891684743 hasConcept C41008148 @default.
- W2891684743 hasConcept C49040817 @default.
- W2891684743 hasConceptScore W2891684743C127413603 @default.
- W2891684743 hasConceptScore W2891684743C136085584 @default.
- W2891684743 hasConceptScore W2891684743C146599234 @default.
- W2891684743 hasConceptScore W2891684743C154945302 @default.
- W2891684743 hasConceptScore W2891684743C160671074 @default.
- W2891684743 hasConceptScore W2891684743C162307627 @default.
- W2891684743 hasConceptScore W2891684743C171250308 @default.
- W2891684743 hasConceptScore W2891684743C176217482 @default.
- W2891684743 hasConceptScore W2891684743C192562407 @default.
- W2891684743 hasConceptScore W2891684743C199360897 @default.
- W2891684743 hasConceptScore W2891684743C21547014 @default.
- W2891684743 hasConceptScore W2891684743C24326235 @default.
- W2891684743 hasConceptScore W2891684743C2779227376 @default.
- W2891684743 hasConceptScore W2891684743C41008148 @default.
- W2891684743 hasConceptScore W2891684743C49040817 @default.
- W2891684743 hasLocation W28916847431 @default.
- W2891684743 hasOpenAccess W2891684743 @default.
- W2891684743 hasPrimaryLocation W28916847431 @default.
- W2891684743 hasRelatedWork W1483768635 @default.
- W2891684743 hasRelatedWork W1980132189 @default.
- W2891684743 hasRelatedWork W1986113854 @default.
- W2891684743 hasRelatedWork W2074647336 @default.
- W2891684743 hasRelatedWork W2090969245 @default.
- W2891684743 hasRelatedWork W2748952813 @default.
- W2891684743 hasRelatedWork W2808925698 @default.
- W2891684743 hasRelatedWork W2891684743 @default.
- W2891684743 hasRelatedWork W2899606096 @default.
- W2891684743 hasRelatedWork W2975222188 @default.
- W2891684743 isParatext "false" @default.
- W2891684743 isRetracted "false" @default.
- W2891684743 magId "2891684743" @default.
- W2891684743 workType "article" @default.