Matches in SemOpenAlex for { <https://semopenalex.org/work/W2891754760> ?p ?o ?g. }
- W2891754760 endingPage "114002" @default.
- W2891754760 startingPage "114002" @default.
- W2891754760 abstract "We report on the effect of carbon sub-monolayer deposition on the growth of thin Si1−x Ge x layers on Si(001) substrates. The deposition of a C sub-monolayer prior to full crystallization of the Si1−x Ge x layer supresses the otherwise energetically favorable Stranksi–Krastanov growth mode upon annealing and yields a smooth surface at high degrees of relaxation for a layer thickness below 100 nm for different Ge contents. The samples are characterized with respect to the surface reconstruction, surface morphology, strain state and defect structure. We discuss the exceptional number of stacking faults in the Si1−x Ge x layer and propose an explanation for the phenomenon. Finally, we present a process flow to grow smooth, undoped and almost fully relaxed Si1−x Ge x layers at very low thickness (<100 nm) for virtual substrate applications." @default.
- W2891754760 created "2018-09-27" @default.
- W2891754760 creator A5001900607 @default.
- W2891754760 creator A5042494873 @default.
- W2891754760 creator A5056345568 @default.
- W2891754760 creator A5061323028 @default.
- W2891754760 date "2018-10-04" @default.
- W2891754760 modified "2023-09-26" @default.
- W2891754760 title "Carbon-mediated epitaxy of SiGe virtual substrates on Si(001)" @default.
- W2891754760 cites W1965073950 @default.
- W2891754760 cites W1968938970 @default.
- W2891754760 cites W1969603020 @default.
- W2891754760 cites W1969950458 @default.
- W2891754760 cites W1971083205 @default.
- W2891754760 cites W1971460444 @default.
- W2891754760 cites W1978177052 @default.
- W2891754760 cites W1978612289 @default.
- W2891754760 cites W1980739628 @default.
- W2891754760 cites W1985100665 @default.
- W2891754760 cites W1985131633 @default.
- W2891754760 cites W1985308848 @default.
- W2891754760 cites W1988780049 @default.
- W2891754760 cites W1990414786 @default.
- W2891754760 cites W1992674220 @default.
- W2891754760 cites W1992692700 @default.
- W2891754760 cites W1993081190 @default.
- W2891754760 cites W1993964078 @default.
- W2891754760 cites W2002115145 @default.
- W2891754760 cites W2003389724 @default.
- W2891754760 cites W2009643206 @default.
- W2891754760 cites W2011042741 @default.
- W2891754760 cites W2011783599 @default.
- W2891754760 cites W2013898108 @default.
- W2891754760 cites W2027695344 @default.
- W2891754760 cites W2033029897 @default.
- W2891754760 cites W2033402627 @default.
- W2891754760 cites W2034779600 @default.
- W2891754760 cites W2040083835 @default.
- W2891754760 cites W2041492467 @default.
- W2891754760 cites W2051045101 @default.
- W2891754760 cites W2053309172 @default.
- W2891754760 cites W2053442507 @default.
- W2891754760 cites W2054461620 @default.
- W2891754760 cites W2056540221 @default.
- W2891754760 cites W2057875422 @default.
- W2891754760 cites W2060853360 @default.
- W2891754760 cites W2067123627 @default.
- W2891754760 cites W2079014271 @default.
- W2891754760 cites W2094778634 @default.
- W2891754760 cites W2127535860 @default.
- W2891754760 cites W2169286278 @default.
- W2891754760 cites W2195246014 @default.
- W2891754760 cites W2334393362 @default.
- W2891754760 cites W2471492012 @default.
- W2891754760 cites W2540626667 @default.
- W2891754760 cites W2735895963 @default.
- W2891754760 cites W2036900331 @default.
- W2891754760 doi "https://doi.org/10.1088/1361-6641/aadffc" @default.
- W2891754760 hasPublicationYear "2018" @default.
- W2891754760 type Work @default.
- W2891754760 sameAs 2891754760 @default.
- W2891754760 citedByCount "2" @default.
- W2891754760 countsByYear W28917547602020 @default.
- W2891754760 countsByYear W28917547602023 @default.
- W2891754760 crossrefType "journal-article" @default.
- W2891754760 hasAuthorship W2891754760A5001900607 @default.
- W2891754760 hasAuthorship W2891754760A5042494873 @default.
- W2891754760 hasAuthorship W2891754760A5056345568 @default.
- W2891754760 hasAuthorship W2891754760A5061323028 @default.
- W2891754760 hasConcept C104779481 @default.
- W2891754760 hasConcept C110738630 @default.
- W2891754760 hasConcept C127413603 @default.
- W2891754760 hasConcept C140205800 @default.
- W2891754760 hasConcept C159985019 @default.
- W2891754760 hasConcept C171250308 @default.
- W2891754760 hasConcept C185592680 @default.
- W2891754760 hasConcept C192562407 @default.
- W2891754760 hasConcept C2779227376 @default.
- W2891754760 hasConcept C42360764 @default.
- W2891754760 hasConcept C49040817 @default.
- W2891754760 hasConceptScore W2891754760C104779481 @default.
- W2891754760 hasConceptScore W2891754760C110738630 @default.
- W2891754760 hasConceptScore W2891754760C127413603 @default.
- W2891754760 hasConceptScore W2891754760C140205800 @default.
- W2891754760 hasConceptScore W2891754760C159985019 @default.
- W2891754760 hasConceptScore W2891754760C171250308 @default.
- W2891754760 hasConceptScore W2891754760C185592680 @default.
- W2891754760 hasConceptScore W2891754760C192562407 @default.
- W2891754760 hasConceptScore W2891754760C2779227376 @default.
- W2891754760 hasConceptScore W2891754760C42360764 @default.
- W2891754760 hasConceptScore W2891754760C49040817 @default.
- W2891754760 hasIssue "11" @default.
- W2891754760 hasLocation W28917547601 @default.
- W2891754760 hasOpenAccess W2891754760 @default.
- W2891754760 hasPrimaryLocation W28917547601 @default.
- W2891754760 hasRelatedWork W1504272055 @default.
- W2891754760 hasRelatedWork W1975574136 @default.
- W2891754760 hasRelatedWork W2058676402 @default.