FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2891809216> ?p ?o ?g. }

• W2891809216 abstract "Stoichiometric crystalline binary metal oxide thin films can be used as channel materials for transparent thin film transistors. However, the nature of the process used to fabricate these films causes most binary metal oxide thin films to be highly conductive, making them unsuitable for channel materials. We overcame this hurdle by forming stoichiometric ultra-thin (5 nm) crystalline In2O3 films by using a thermal atomic layer deposition method. Specifically, (3-(dimethylamino)propyl)dimethylindium was used as a liquid precursor and ozone as an oxygen source to grow In2O3 thin films at a high growth rate of 0.06 nm/cycle. Adjustment of the deposition processing temperature followed by annealing in an oxygen atmosphere enabled us to fully crystallize the film into a cubic bixbyite structure with the retained stoichiometry. The transparent crystalline ultra-thin In2O3-based bottom-gate thin film transistors showed excellent and statistically uniform switching characteristics such as a high Ion/Ioff ratio exceeding 107, a high linear mobility of 41.8 cm2/V s, a small subthreshold swing of 100 mV/dec, and a low hysteresis of 0.05 V. Our approach offers a straightforward scheme, which is compatible with oxide electronics, for fabricating a transparent metal oxide device without resorting to complicated oxide compositional strategies." @default.
• W2891809216 created "2018-09-27" @default.
• W2891809216 creator A5016395108 @default.
• W2891809216 creator A5042230083 @default.
• W2891809216 creator A5046574035 @default.
• W2891809216 creator A5046819573 @default.
• W2891809216 creator A5049786123 @default.
• W2891809216 creator A5051772626 @default.
• W2891809216 creator A5060007526 @default.
• W2891809216 date "2018-09-10" @default.
• W2891809216 modified "2023-10-16" @default.
• W2891809216 title "High mobility ultra-thin crystalline indium oxide thin film transistor using atomic layer deposition" @default.
• W2891809216 cites W1987766131 @default.
• W2891809216 cites W1990798163 @default.
• W2891809216 cites W1994277498 @default.
• W2891809216 cites W1998760812 @default.
• W2891809216 cites W1999589524 @default.
• W2891809216 cites W2001748776 @default.
• W2891809216 cites W2004907704 @default.
• W2891809216 cites W2008362094 @default.
• W2891809216 cites W2010540469 @default.
• W2891809216 cites W2023603575 @default.
• W2891809216 cites W2033564150 @default.
• W2891809216 cites W2033787147 @default.
• W2891809216 cites W2033860489 @default.
• W2891809216 cites W2044536171 @default.
• W2891809216 cites W2046384765 @default.
• W2891809216 cites W2052025371 @default.
• W2891809216 cites W2055146671 @default.
• W2891809216 cites W2078207953 @default.
• W2891809216 cites W2085907778 @default.
• W2891809216 cites W2090404969 @default.
• W2891809216 cites W2092426063 @default.
• W2891809216 cites W2124132059 @default.
• W2891809216 cites W2134960271 @default.
• W2891809216 cites W2138369566 @default.
• W2891809216 cites W2171135716 @default.
• W2891809216 cites W2308060738 @default.
• W2891809216 cites W2336873483 @default.
• W2891809216 cites W2466221081 @default.
• W2891809216 cites W2613789421 @default.
• W2891809216 cites W2766176175 @default.
• W2891809216 cites W976641046 @default.
• W2891809216 doi "https://doi.org/10.1063/1.5041029" @default.
• W2891809216 hasPublicationYear "2018" @default.
• W2891809216 type Work @default.
• W2891809216 sameAs 2891809216 @default.
• W2891809216 citedByCount "38" @default.
• W2891809216 countsByYear W28918092162019 @default.
• W2891809216 countsByYear W28918092162020 @default.
• W2891809216 countsByYear W28918092162021 @default.
• W2891809216 countsByYear W28918092162022 @default.
• W2891809216 countsByYear W28918092162023 @default.
• W2891809216 crossrefType "journal-article" @default.
• W2891809216 hasAuthorship W2891809216A5016395108 @default.
• W2891809216 hasAuthorship W2891809216A5042230083 @default.
• W2891809216 hasAuthorship W2891809216A5046574035 @default.
• W2891809216 hasAuthorship W2891809216A5046819573 @default.
• W2891809216 hasAuthorship W2891809216A5049786123 @default.
• W2891809216 hasAuthorship W2891809216A5051772626 @default.
• W2891809216 hasAuthorship W2891809216A5060007526 @default.
• W2891809216 hasConcept C127413603 @default.
• W2891809216 hasConcept C144082473 @default.
• W2891809216 hasConcept C171250308 @default.
• W2891809216 hasConcept C178790620 @default.
• W2891809216 hasConcept C185592680 @default.
• W2891809216 hasConcept C19067145 @default.
• W2891809216 hasConcept C191897082 @default.
• W2891809216 hasConcept C192562407 @default.
• W2891809216 hasConcept C2777855556 @default.
• W2891809216 hasConcept C2779227376 @default.
• W2891809216 hasConcept C2779851234 @default.
• W2891809216 hasConcept C42360764 @default.
• W2891809216 hasConcept C49040817 @default.
• W2891809216 hasConcept C543292547 @default.
• W2891809216 hasConcept C69544855 @default.
• W2891809216 hasConcept C87359718 @default.
• W2891809216 hasConceptScore W2891809216C127413603 @default.
• W2891809216 hasConceptScore W2891809216C144082473 @default.
• W2891809216 hasConceptScore W2891809216C171250308 @default.
• W2891809216 hasConceptScore W2891809216C178790620 @default.
• W2891809216 hasConceptScore W2891809216C185592680 @default.
• W2891809216 hasConceptScore W2891809216C19067145 @default.
• W2891809216 hasConceptScore W2891809216C191897082 @default.
• W2891809216 hasConceptScore W2891809216C192562407 @default.
• W2891809216 hasConceptScore W2891809216C2777855556 @default.
• W2891809216 hasConceptScore W2891809216C2779227376 @default.
• W2891809216 hasConceptScore W2891809216C2779851234 @default.
• W2891809216 hasConceptScore W2891809216C42360764 @default.
• W2891809216 hasConceptScore W2891809216C49040817 @default.
• W2891809216 hasConceptScore W2891809216C543292547 @default.
• W2891809216 hasConceptScore W2891809216C69544855 @default.
• W2891809216 hasConceptScore W2891809216C87359718 @default.
• W2891809216 hasIssue "11" @default.
• W2891809216 hasLocation W28918092161 @default.
• W2891809216 hasOpenAccess W2891809216 @default.
• W2891809216 hasPrimaryLocation W28918092161 @default.
• W2891809216 hasRelatedWork W2321470551 @default.
• W2891809216 hasRelatedWork W2416530278 @default.
• W2891809216 hasRelatedWork W2558617580 @default.

• next