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- W2891836211 abstract "A novel hydrogen sensor has been developed by using an optimized 0.18-μm resistive random access memory process with a Pt/Ta <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> O <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>5</sub> /TaO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>x</sub> /TaN stack. This resistive hydrogen sensor (ReHsensor) conforms to the ISO26142 standard in which it exhibits exceptional sensing capabilities, including a short response time (about 20 s for 1 vol.% hydrogen gas), high sensitivity, wide hydrogen concentration detection range (up to 4 vol.%) in air and N <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> ambient, high gas selectivity (no reaction with CH <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>4</sub> , CO, CH <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> OH, or CH <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> COCH <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>3</sub> ) and is immune to poisoning by SO <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> and hexamethyl disiloxane. As it does not require a heater, the power consumption of the ReHsensor is very low, at 0.4 mW." @default.
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- W2891836211 date "2018-11-01" @default.
- W2891836211 modified "2023-10-18" @default.
- W2891836211 title "From Memory to Sensor: Ultralow Power and High Selectivity Hydrogen Sensor Based on ReRAM Technology" @default.
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- W2891836211 doi "https://doi.org/10.1109/ted.2018.2868081" @default.
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