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- W2892168386 abstract "Electron beam patterning is an important technology in the fabrication of miniaturized photonic devices. The fabrication process conventionally involves the use of radiation sensitive polymer-based solutions (called resists). We propose to replace typical polymer resists with eco-friendly solvent-free room temperature ionic liquids (RTILs), which are polymerized in situ and solidified by an electron beam. It is demonstrated that the shapes of polymerized structures are different for high-viscous Cl-based RTILs and low-viscous NTf2-based RTILs. Due to the the satisfactory quality of the polymerized spatial microstructures and their light transmission properties, the RTIL-derived microstructures are potentially attractive as photonic elements for near-infrared." @default.
- W2892168386 created "2018-09-27" @default.
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- W2892168386 date "2018-09-27" @default.
- W2892168386 modified "2023-10-01" @default.
- W2892168386 title "Ionic liquids—a novel material for planar photonics" @default.
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- W2892168386 doi "https://doi.org/10.1088/1361-6528/aae01e" @default.
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