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• W2892215597 abstract "Multiple patterning lithography has been widely adopted in advanced technology nodes of VLSI manufacturing. As a key step in the design flow, multiple patterning layout decomposition (MPLD) is critical to design closure. Due to the NP-hardness of the general decomposition problem, various efficient algorithms have been proposed with high quality solutions. However, with increasingly complicated design flow and peripheral processing steps, developing a high-quality layout decomposer becomes more and more difficult, slowing down the further advancement in this field. This paper presents OpenMPL [1], an open-source layout decomposition framework, with well-separated peripheral processing and the core solving steps. We demonstrate the flexibility of the framework with efficient implementations of various state-of-the-art algorithms, which enable us to reproduce most of the recent results on widely-recognized benchmarks. We believe OpenMPL can pave the road for developing layout decomposition engines and stimulate further researches on this problem." @default.
• W2892215597 created "2018-09-27" @default.
• W2892215597 creator A5000432967 @default.
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• W2892215597 date "2018-09-20" @default.
• W2892215597 modified "2023-09-23" @default.
• W2892215597 title "OpenMPL: An Open Source Layout Decomposer" @default.
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• W2892215597 doi "https://doi.org/10.48550/arxiv.1809.07554" @default.
• W2892215597 hasPublicationYear "2018" @default.
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