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• W2892281889 startingPage "6557" @default.
• W2892281889 abstract "In this study, we proposed a novel method to grow high-quality AlN films on sputtered AlN/sapphire substrates by designing an AlN gradient interlayer (GIL-AlN)." @default.
• W2892281889 created "2018-09-27" @default.
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• W2892281889 date "2018-01-01" @default.
• W2892281889 modified "2023-10-12" @default.
• W2892281889 title "AlN gradient interlayer design for the growth of high-quality AlN epitaxial film on sputtered AlN/sapphire substrate" @default.
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• W2892281889 doi "https://doi.org/10.1039/c8ce01185k" @default.
• W2892281889 hasPublicationYear "2018" @default.
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