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- W2892301250 abstract "This paper reports the design and EM-simulations of Ku-band High-Q tunable and switchable cavity resonators and 2-pole cavity filters using, microelectromechanical system (MEMS) fixed fixed beams and, Vanadium Dioxide (VO 2 ) Phase Change Material (PCM) tuners. The devices are copper surfacemounted cavities bonded on low permittivity substrates, on which are processed RF-MEMS and VO2 tuners. The tuners are located opposite to capacitive posts in the middle of each cavity, where the E-field of the resonant mode is maximum in order to obtain a wide tuning range. By using either the actuation of the fixed fixed beams, or the reversible Metal-to-Insulator Transition (MIT) of VO 2 , the resonators and filters resonant frequencies are shifted by achieving a variation of the parasitic capacitance created between the posts top and the tuners. Electromagnetic simulations have been conducted and exhibit at least 1 GHz of frequency shift and high unloaded quality factors (Q u )." @default.
- W2892301250 created "2018-09-27" @default.
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- W2892301250 date "2018-07-01" @default.
- W2892301250 modified "2023-09-26" @default.
- W2892301250 title "Ku Band High-Q Tunable Cavity Filters using MEMS and Vanadium Dioxide (VO<inf>2</inf>) Tuners" @default.
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- W2892301250 doi "https://doi.org/10.1109/imws-amp.2018.8457138" @default.
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