Matches in SemOpenAlex for { <https://semopenalex.org/work/W2892611231> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W2892611231 endingPage "108" @default.
- W2892611231 startingPage "96" @default.
- W2892611231 abstract "The key issue in semiconductor rapid thermal processing (RTP), where silicon wafers are heated to desired temperatures, is to ensure uniform wafer temperature profiles. This in turn guarantees that the manufactured integrated circuits (IC), which are spread over the entire wafer, can be processed in an equal measure. In this study, a mathematical model capturing the physical behavior of the heating-up process is presented. It relies mainly on the well-known partial differential heat equation, governing the temperature distribution in a given region of a given material. Based on this, an observer as also a control law is proposed, which in combination turned out to be superior to conventional RTP strategies. The approach is validated in practice at a real world heating system with different wafer types." @default.
- W2892611231 created "2018-10-05" @default.
- W2892611231 creator A5025122566 @default.
- W2892611231 creator A5032824476 @default.
- W2892611231 creator A5043859902 @default.
- W2892611231 creator A5049326535 @default.
- W2892611231 date "2018-10-01" @default.
- W2892611231 modified "2023-10-01" @default.
- W2892611231 title "Observer-based temperature control of an LED heated silicon wafer" @default.
- W2892611231 cites W1983366162 @default.
- W2892611231 cites W2006798482 @default.
- W2892611231 cites W2127230039 @default.
- W2892611231 cites W2133095285 @default.
- W2892611231 cites W2136404068 @default.
- W2892611231 cites W2141474784 @default.
- W2892611231 cites W2151036706 @default.
- W2892611231 cites W2168157969 @default.
- W2892611231 cites W2735593964 @default.
- W2892611231 doi "https://doi.org/10.1016/j.jprocont.2018.07.006" @default.
- W2892611231 hasPublicationYear "2018" @default.
- W2892611231 type Work @default.
- W2892611231 sameAs 2892611231 @default.
- W2892611231 citedByCount "8" @default.
- W2892611231 countsByYear W28926112312019 @default.
- W2892611231 countsByYear W28926112312020 @default.
- W2892611231 countsByYear W28926112312021 @default.
- W2892611231 countsByYear W28926112312022 @default.
- W2892611231 crossrefType "journal-article" @default.
- W2892611231 hasAuthorship W2892611231A5025122566 @default.
- W2892611231 hasAuthorship W2892611231A5032824476 @default.
- W2892611231 hasAuthorship W2892611231A5043859902 @default.
- W2892611231 hasAuthorship W2892611231A5049326535 @default.
- W2892611231 hasConcept C108225325 @default.
- W2892611231 hasConcept C111919701 @default.
- W2892611231 hasConcept C121332964 @default.
- W2892611231 hasConcept C127413603 @default.
- W2892611231 hasConcept C154945302 @default.
- W2892611231 hasConcept C155386361 @default.
- W2892611231 hasConcept C160671074 @default.
- W2892611231 hasConcept C192562407 @default.
- W2892611231 hasConcept C204530211 @default.
- W2892611231 hasConcept C24326235 @default.
- W2892611231 hasConcept C2775924081 @default.
- W2892611231 hasConcept C2780704645 @default.
- W2892611231 hasConcept C41008148 @default.
- W2892611231 hasConcept C47446073 @default.
- W2892611231 hasConcept C49040817 @default.
- W2892611231 hasConcept C530198007 @default.
- W2892611231 hasConcept C536315585 @default.
- W2892611231 hasConcept C544956773 @default.
- W2892611231 hasConcept C62520636 @default.
- W2892611231 hasConcept C72832162 @default.
- W2892611231 hasConcept C78519656 @default.
- W2892611231 hasConcept C97355855 @default.
- W2892611231 hasConcept C98045186 @default.
- W2892611231 hasConceptScore W2892611231C108225325 @default.
- W2892611231 hasConceptScore W2892611231C111919701 @default.
- W2892611231 hasConceptScore W2892611231C121332964 @default.
- W2892611231 hasConceptScore W2892611231C127413603 @default.
- W2892611231 hasConceptScore W2892611231C154945302 @default.
- W2892611231 hasConceptScore W2892611231C155386361 @default.
- W2892611231 hasConceptScore W2892611231C160671074 @default.
- W2892611231 hasConceptScore W2892611231C192562407 @default.
- W2892611231 hasConceptScore W2892611231C204530211 @default.
- W2892611231 hasConceptScore W2892611231C24326235 @default.
- W2892611231 hasConceptScore W2892611231C2775924081 @default.
- W2892611231 hasConceptScore W2892611231C2780704645 @default.
- W2892611231 hasConceptScore W2892611231C41008148 @default.
- W2892611231 hasConceptScore W2892611231C47446073 @default.
- W2892611231 hasConceptScore W2892611231C49040817 @default.
- W2892611231 hasConceptScore W2892611231C530198007 @default.
- W2892611231 hasConceptScore W2892611231C536315585 @default.
- W2892611231 hasConceptScore W2892611231C544956773 @default.
- W2892611231 hasConceptScore W2892611231C62520636 @default.
- W2892611231 hasConceptScore W2892611231C72832162 @default.
- W2892611231 hasConceptScore W2892611231C78519656 @default.
- W2892611231 hasConceptScore W2892611231C97355855 @default.
- W2892611231 hasConceptScore W2892611231C98045186 @default.
- W2892611231 hasLocation W28926112311 @default.
- W2892611231 hasOpenAccess W2892611231 @default.
- W2892611231 hasPrimaryLocation W28926112311 @default.
- W2892611231 hasRelatedWork W2056707302 @default.
- W2892611231 hasRelatedWork W2065775411 @default.
- W2892611231 hasRelatedWork W2088385920 @default.
- W2892611231 hasRelatedWork W2157686919 @default.
- W2892611231 hasRelatedWork W2172222141 @default.
- W2892611231 hasRelatedWork W2334747419 @default.
- W2892611231 hasRelatedWork W247509610 @default.
- W2892611231 hasRelatedWork W2787114792 @default.
- W2892611231 hasRelatedWork W4251741260 @default.
- W2892611231 hasRelatedWork W47524136 @default.
- W2892611231 hasVolume "70" @default.
- W2892611231 isParatext "false" @default.
- W2892611231 isRetracted "false" @default.
- W2892611231 magId "2892611231" @default.
- W2892611231 workType "article" @default.