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- W2892787037 abstract "We report on the development of an ion beam irradiation facility for focusing beams of highly charged ions (HCI) down to diameters in the low micrometer range. The use of highly charged noble gas ions creates unique features leading to applications and technical solutions which can complement the existing equipment market. The developed, built and commissioned facility consists of an electron beam ion source (EBIS), a downstream Wien filter for ion mass and charge state separation, an ion-optical column for the fine-focussed ion beam (FIB) formation, a target chamber with a sample transfer system, a sample holder with sub-micrometer positioning precision and a ToF-SIMS spectrometer for high-resolved surface analysis." @default.
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- W2892787037 date "2018-01-01" @default.
- W2892787037 modified "2023-09-25" @default.
- W2892787037 title "EBIS-based HCI micro-beams" @default.
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- W2892787037 doi "https://doi.org/10.1063/1.5053408" @default.
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