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• W2893105842 abstract "According to their inherent characteristics, MEMS resonant accelerometers are suitable for low-frequency, low-g acceleration measurement. In this paper, we report a MEMS accelerometer based on double-ended-tuning fork resonators. The scale factor of our sensor is 1153.3 Hz/g and the bias stability of the oscillator is 58 ppb (parts per billion) for an averaging time of 1 s. The static test showed that the resolution of our sensor was 13.8 μg. The dynamic performance was demonstrated by single-frequency and hybrid-frequency vibration tests, and the results showed that our device is suitable for detecting low-frequency vibration (0.5–5 Hz). The cross-axis sensitivity is 1.33%. Compared with a standard charge accelerometer, our device showed its superiority in mixed acceleration measurement, which makes it a potentially attractive option for geophone or seismometer applications." @default.
• W2893105842 created "2018-10-05" @default.
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• W2893105842 date "2018-11-01" @default.
• W2893105842 modified "2023-10-02" @default.
• W2893105842 title "A MEMS resonant accelerometer for low-frequency vibration detection" @default.
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• W2893105842 doi "https://doi.org/10.1016/j.sna.2018.09.055" @default.
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