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- W2893819915 abstract "This Suppression of non-harmonic near the desired mode vibrations known as spurious modes affecting the resonators spectrum significantly is one of the most important problems associated with RF MEMS capacitive resonators. Since these modes could be very strong, they may jeopardize the operation of the resonators and consequently the whole wireless transceivers. This issue is even more critical for ring shaped resonators which have advantages in small motional resistance and possibility to achieve to GHz frequencies with proper dimensions and high quality factors. This paper presents an electrode configuration method for suppression of spurious modes for radial contour mode ring shaped resonators. This method is based on assigning all the surrounded electrodes by the resonators as excitation and all the surrounding electrodes as sensing. This configuration suppresses the spurious modes by both differencing their outputs and not exciting them. Harmonic analysis verifies our approach by illustrating a very pure spectrum with all the spurious modes suppressed." @default.
- W2893819915 created "2018-10-05" @default.
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- W2893819915 date "2018-05-01" @default.
- W2893819915 modified "2023-09-25" @default.
- W2893819915 title "Electrode Configuration for Complete Suppression of Spurious Modes in Capacitive RF MEMS Ring Resonators" @default.
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- W2893819915 doi "https://doi.org/10.1109/icee.2018.8472585" @default.
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