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• W2893883305 abstract "Stressed nanomechanical resonators are known to have exceptionally high quality factors ($Q$) due to the dilution of intrinsic dissipation by stress. Typically, the amount of dissipation dilution and thus the resonator $Q$ is limited by the high mode curvature region near the clamps. Here we study the effect of clamp geometry on the $Q$ of nanobeams made of high-stress $mathrm{Si_3N_4}$. We find that tapering the beam near the clamp - and locally increasing the stress - leads to increased $Q$ of MHz-frequency low order modes due to enhanced dissipation dilution. Contrary to recent studies of tethered-membrane resonators, we find that widening the clamps leads to decreased $Q$ despite increased stress in the beam bulk. The tapered-clamping approach has practical advantages compared to the recently developed soft-clamping technique. Tapered-clamping enhances the $Q$ of the fundamental mode and can be implemented without increasing the device size." @default.
• W2893883305 created "2018-10-05" @default.
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• W2893883305 date "2019-02-27" @default.
• W2893883305 modified "2023-10-14" @default.
• W2893883305 title "Clamp-Tapering Increases the Quality Factor of Stressed Nanobeams" @default.
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• W2893883305 doi "https://doi.org/10.1021/acs.nanolett.8b04942" @default.
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• W2893883305 hasPublicationYear "2019" @default.
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