Matches in SemOpenAlex for { <https://semopenalex.org/work/W2894490222> ?p ?o ?g. }
Showing items 1 to 98 of
98
with 100 items per page.
- W2894490222 abstract "We report the effect of post-metallization annealing (PMA) on the electrical behavior of Pt/Ru/PbZr0.52Ti0.48O3(PZT)/Pt capacitors and correlations with the physical chemistry of the top electrode/PZT interface. PMA improves the electrical characteristics, in particular the breakdown field while inducing important chemical and structural modifications at the interface. The Ru electrode layer is oxidized and disrupted. There is evidence for the formation of RuOx and ZrRuOx metallic phases at the interface but no Pb transport into the electrode region is observed." @default.
- W2894490222 created "2018-10-05" @default.
- W2894490222 creator A5008449020 @default.
- W2894490222 creator A5016596658 @default.
- W2894490222 creator A5017816857 @default.
- W2894490222 creator A5034373348 @default.
- W2894490222 creator A5077253206 @default.
- W2894490222 creator A5082827433 @default.
- W2894490222 date "2018-09-24" @default.
- W2894490222 modified "2023-09-25" @default.
- W2894490222 title "Correlation of electrical characteristics with interface chemistry and structure in Pt/Ru/PbZr0.52Ti0.48O3/Pt capacitors after post metallization annealing" @default.
- W2894490222 cites W1533813002 @default.
- W2894490222 cites W1560352165 @default.
- W2894490222 cites W1562774398 @default.
- W2894490222 cites W1990757633 @default.
- W2894490222 cites W2007558924 @default.
- W2894490222 cites W2019926392 @default.
- W2894490222 cites W2027060397 @default.
- W2894490222 cites W2031882896 @default.
- W2894490222 cites W2039772028 @default.
- W2894490222 cites W2050154841 @default.
- W2894490222 cites W2056344661 @default.
- W2894490222 cites W2064830258 @default.
- W2894490222 cites W2075604101 @default.
- W2894490222 cites W2081056165 @default.
- W2894490222 cites W2095306704 @default.
- W2894490222 cites W2095377710 @default.
- W2894490222 cites W2114334126 @default.
- W2894490222 cites W2134777911 @default.
- W2894490222 cites W2135758133 @default.
- W2894490222 cites W2139829348 @default.
- W2894490222 cites W2152932968 @default.
- W2894490222 cites W2184043371 @default.
- W2894490222 cites W2315171853 @default.
- W2894490222 cites W2410203227 @default.
- W2894490222 cites W2736927057 @default.
- W2894490222 cites W2775122931 @default.
- W2894490222 doi "https://doi.org/10.1063/1.5041767" @default.
- W2894490222 hasPublicationYear "2018" @default.
- W2894490222 type Work @default.
- W2894490222 sameAs 2894490222 @default.
- W2894490222 citedByCount "6" @default.
- W2894490222 countsByYear W28944902222019 @default.
- W2894490222 countsByYear W28944902222022 @default.
- W2894490222 countsByYear W28944902222023 @default.
- W2894490222 crossrefType "journal-article" @default.
- W2894490222 hasAuthorship W2894490222A5008449020 @default.
- W2894490222 hasAuthorship W2894490222A5016596658 @default.
- W2894490222 hasAuthorship W2894490222A5017816857 @default.
- W2894490222 hasAuthorship W2894490222A5034373348 @default.
- W2894490222 hasAuthorship W2894490222A5077253206 @default.
- W2894490222 hasAuthorship W2894490222A5082827433 @default.
- W2894490222 hasConcept C119599485 @default.
- W2894490222 hasConcept C127413603 @default.
- W2894490222 hasConcept C147789679 @default.
- W2894490222 hasConcept C159985019 @default.
- W2894490222 hasConcept C165801399 @default.
- W2894490222 hasConcept C17525397 @default.
- W2894490222 hasConcept C185592680 @default.
- W2894490222 hasConcept C191897082 @default.
- W2894490222 hasConcept C192562407 @default.
- W2894490222 hasConcept C2777855556 @default.
- W2894490222 hasConcept C49040817 @default.
- W2894490222 hasConcept C52192207 @default.
- W2894490222 hasConcept C544153396 @default.
- W2894490222 hasConceptScore W2894490222C119599485 @default.
- W2894490222 hasConceptScore W2894490222C127413603 @default.
- W2894490222 hasConceptScore W2894490222C147789679 @default.
- W2894490222 hasConceptScore W2894490222C159985019 @default.
- W2894490222 hasConceptScore W2894490222C165801399 @default.
- W2894490222 hasConceptScore W2894490222C17525397 @default.
- W2894490222 hasConceptScore W2894490222C185592680 @default.
- W2894490222 hasConceptScore W2894490222C191897082 @default.
- W2894490222 hasConceptScore W2894490222C192562407 @default.
- W2894490222 hasConceptScore W2894490222C2777855556 @default.
- W2894490222 hasConceptScore W2894490222C49040817 @default.
- W2894490222 hasConceptScore W2894490222C52192207 @default.
- W2894490222 hasConceptScore W2894490222C544153396 @default.
- W2894490222 hasFunder F4320321038 @default.
- W2894490222 hasIssue "13" @default.
- W2894490222 hasLocation W28944902221 @default.
- W2894490222 hasOpenAccess W2894490222 @default.
- W2894490222 hasPrimaryLocation W28944902221 @default.
- W2894490222 hasRelatedWork W2149089408 @default.
- W2894490222 hasRelatedWork W2324807869 @default.
- W2894490222 hasRelatedWork W2335089547 @default.
- W2894490222 hasRelatedWork W2558617580 @default.
- W2894490222 hasRelatedWork W2899084033 @default.
- W2894490222 hasRelatedWork W2902552153 @default.
- W2894490222 hasRelatedWork W3207734879 @default.
- W2894490222 hasRelatedWork W3217382782 @default.
- W2894490222 hasRelatedWork W4205510562 @default.
- W2894490222 hasRelatedWork W4253731651 @default.
- W2894490222 hasVolume "113" @default.
- W2894490222 isParatext "false" @default.
- W2894490222 isRetracted "false" @default.
- W2894490222 magId "2894490222" @default.
- W2894490222 workType "article" @default.