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• W2894547884 abstract "A resonator array-based spectrometer for visible/near-infrared (NIR) wavelengths is fabricated on a low-loss silicon nitride (Si3N4) material platform. Ideally, a spectrometer should uniformly sample the input spectrum. However, resonator-based spectrometers, in which each spectral sample corresponds to resonance wavelength of one of the resonators in the array, suffer from wavelength sampling non-uniformity caused by the high sensitivity of the resonant wavelengths of different resonators to the dimensional variations caused by fabrication imperfections. Using an alignment-insensitive post-fabrication trimming technique, we reduce the standard deviation (STD) of resonance wavelength of a 60-channel integrated photonic spectrometer in Si3N4 to a record-low value of 5&#x00A0;pm in the visible wavelength range. This approach can be used to realize wideband and uniform visible spectrometers that are desirable for applications such as optical signal processing and biological sensing." @default.
• W2894547884 created "2018-10-05" @default.
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• W2894547884 date "2018-10-03" @default.
• W2894547884 modified "2023-10-02" @default.
• W2894547884 title "Highly-uniform resonator-based visible spectrometer on a Si₃N₄ platform with robust and accurate post-fabrication trimming" @default.
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• W2894547884 doi "https://doi.org/10.1364/ol.43.004887" @default.
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