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- W2894585963 abstract "This book provides useful guidance to develop high sensitivity and linearity, and fast response SiC sensing devices. It summarizes the growth of SiC, properties and fabrication processes of SiC devices and introduces the thermoelectrical sensing theories in different SiC morphologies and polytypes." @default.
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- W2894585963 date "2018-01-01" @default.
- W2894585963 modified "2023-09-26" @default.
- W2894585963 title "Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors" @default.
- W2894585963 doi "https://doi.org/10.1007/978-981-13-2571-7" @default.
- W2894585963 hasPublicationYear "2018" @default.
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