Matches in SemOpenAlex for { <https://semopenalex.org/work/W2894590916> ?p ?o ?g. }
- W2894590916 abstract "Abstract Delaminating failure is the fatal failure mode of Micro Electro Mechanical Systems(MEMS) multi-layer membrane structures and severely affects the reliability of MEMS devices. In this work, a multi-layer membrane structural model of a thermo-optic switch is established under the framework of generalized thermoelastic theory, and the distribution of interlayer temperature, thermal mismatch stress and core refractive index is calculated. The effect of relaxation time on thermal mismatch stress and refractive index is discussed, and numerical results show that the thermal mismatch stress increases with the heating power. When the relaxation time rises to 10 − 3 s magnitude, the thermal mismatch stress decreases, the core layer reaches a high steady-state temperature and the refractive index of the core layer expands. These results provide a new idea for the research and development of new devices; that is, the adoption of core layer materials with long relaxation time can improve the reliability of MEMS devices." @default.
- W2894590916 created "2018-10-12" @default.
- W2894590916 creator A5003236290 @default.
- W2894590916 creator A5010015600 @default.
- W2894590916 creator A5014916958 @default.
- W2894590916 creator A5036872080 @default.
- W2894590916 date "2019-02-01" @default.
- W2894590916 modified "2023-10-08" @default.
- W2894590916 title "Generalized thermoelastic analysis of thermo-optic switch multi-layer structure" @default.
- W2894590916 cites W1968106895 @default.
- W2894590916 cites W1975357130 @default.
- W2894590916 cites W2040930709 @default.
- W2894590916 cites W2055259012 @default.
- W2894590916 cites W2060304818 @default.
- W2894590916 cites W2063238383 @default.
- W2894590916 cites W2072511123 @default.
- W2894590916 cites W2086457442 @default.
- W2894590916 cites W2117934273 @default.
- W2894590916 cites W2314670311 @default.
- W2894590916 cites W2519102148 @default.
- W2894590916 cites W2580472257 @default.
- W2894590916 doi "https://doi.org/10.1016/j.ijleo.2018.10.009" @default.
- W2894590916 hasPublicationYear "2019" @default.
- W2894590916 type Work @default.
- W2894590916 sameAs 2894590916 @default.
- W2894590916 citedByCount "4" @default.
- W2894590916 countsByYear W28945909162019 @default.
- W2894590916 countsByYear W28945909162020 @default.
- W2894590916 crossrefType "journal-article" @default.
- W2894590916 hasAuthorship W2894590916A5003236290 @default.
- W2894590916 hasAuthorship W2894590916A5010015600 @default.
- W2894590916 hasAuthorship W2894590916A5014916958 @default.
- W2894590916 hasAuthorship W2894590916A5036872080 @default.
- W2894590916 hasConcept C120665830 @default.
- W2894590916 hasConcept C121332964 @default.
- W2894590916 hasConcept C127413603 @default.
- W2894590916 hasConcept C138885662 @default.
- W2894590916 hasConcept C149912024 @default.
- W2894590916 hasConcept C15744967 @default.
- W2894590916 hasConcept C159985019 @default.
- W2894590916 hasConcept C163258240 @default.
- W2894590916 hasConcept C18762648 @default.
- W2894590916 hasConcept C192562407 @default.
- W2894590916 hasConcept C202974441 @default.
- W2894590916 hasConcept C204530211 @default.
- W2894590916 hasConcept C21036866 @default.
- W2894590916 hasConcept C2164484 @default.
- W2894590916 hasConcept C2776026197 @default.
- W2894590916 hasConcept C2776029896 @default.
- W2894590916 hasConcept C2779227376 @default.
- W2894590916 hasConcept C37977207 @default.
- W2894590916 hasConcept C41895202 @default.
- W2894590916 hasConcept C42067758 @default.
- W2894590916 hasConcept C43214815 @default.
- W2894590916 hasConcept C47378062 @default.
- W2894590916 hasConcept C49040817 @default.
- W2894590916 hasConcept C77805123 @default.
- W2894590916 hasConcept C78519656 @default.
- W2894590916 hasConcept C87359718 @default.
- W2894590916 hasConcept C92458943 @default.
- W2894590916 hasConcept C97355855 @default.
- W2894590916 hasConceptScore W2894590916C120665830 @default.
- W2894590916 hasConceptScore W2894590916C121332964 @default.
- W2894590916 hasConceptScore W2894590916C127413603 @default.
- W2894590916 hasConceptScore W2894590916C138885662 @default.
- W2894590916 hasConceptScore W2894590916C149912024 @default.
- W2894590916 hasConceptScore W2894590916C15744967 @default.
- W2894590916 hasConceptScore W2894590916C159985019 @default.
- W2894590916 hasConceptScore W2894590916C163258240 @default.
- W2894590916 hasConceptScore W2894590916C18762648 @default.
- W2894590916 hasConceptScore W2894590916C192562407 @default.
- W2894590916 hasConceptScore W2894590916C202974441 @default.
- W2894590916 hasConceptScore W2894590916C204530211 @default.
- W2894590916 hasConceptScore W2894590916C21036866 @default.
- W2894590916 hasConceptScore W2894590916C2164484 @default.
- W2894590916 hasConceptScore W2894590916C2776026197 @default.
- W2894590916 hasConceptScore W2894590916C2776029896 @default.
- W2894590916 hasConceptScore W2894590916C2779227376 @default.
- W2894590916 hasConceptScore W2894590916C37977207 @default.
- W2894590916 hasConceptScore W2894590916C41895202 @default.
- W2894590916 hasConceptScore W2894590916C42067758 @default.
- W2894590916 hasConceptScore W2894590916C43214815 @default.
- W2894590916 hasConceptScore W2894590916C47378062 @default.
- W2894590916 hasConceptScore W2894590916C49040817 @default.
- W2894590916 hasConceptScore W2894590916C77805123 @default.
- W2894590916 hasConceptScore W2894590916C78519656 @default.
- W2894590916 hasConceptScore W2894590916C87359718 @default.
- W2894590916 hasConceptScore W2894590916C92458943 @default.
- W2894590916 hasConceptScore W2894590916C97355855 @default.
- W2894590916 hasFunder F4320321001 @default.
- W2894590916 hasFunder F4320327865 @default.
- W2894590916 hasLocation W28945909161 @default.
- W2894590916 hasOpenAccess W2894590916 @default.
- W2894590916 hasPrimaryLocation W28945909161 @default.
- W2894590916 hasRelatedWork W1985771813 @default.
- W2894590916 hasRelatedWork W1990266976 @default.
- W2894590916 hasRelatedWork W2008868055 @default.
- W2894590916 hasRelatedWork W2025591867 @default.
- W2894590916 hasRelatedWork W2082619602 @default.
- W2894590916 hasRelatedWork W2093852542 @default.