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• W2894603619 abstract "This chapter presents the future prospect of SiC MEMS thermoelectrical sensing devices in terms of the development of new platform and integration capability of SiC with other materials for high-temperature applications. The chapter also describes the possibility of using the thermoelectrical effect in SiC for possible applications in sensing systems, including resonant sensors. Challenges and opportunities for the development of SiC thermal devices in high-temperature applications will also be discussed." @default.
• W2894603619 created "2018-10-12" @default.
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• W2894603619 date "2018-01-01" @default.
• W2894603619 modified "2023-09-26" @default.
• W2894603619 title "Future Prospects of SiC Thermoelectrical Sensing Devices" @default.
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• W2894603619 doi "https://doi.org/10.1007/978-981-13-2571-7_7" @default.
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