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- W2894664314 abstract "With the introduction of its fifth-generation NXE:3400B scanner, ASML brought EUV to High-Volume Manufacturing for 7 nm node lithography and beyond with full support of pellicle. This paper presents an update on lithographic performance results obtained with the NXE:3400B, characterized by an NA of 0.33, a Pupil Fill Ratio (PFR) of 0.2 and throughput capability of 125 wafers per hour. Advances in source power and system availability have enabled a continued increase of productivity. To maximize the number of yielding dies per day excellent Overlay, Focus, and Critical Dimension (CD) control have been realized, combining intrinsic tool stability with holistic control schemes. We will also show matching performance for both Overlay and Imaging, and further improvements in Focus Process Dependencies for the 5nm node." @default.
- W2894664314 created "2018-10-12" @default.
- W2894664314 creator A5055377840 @default.
- W2894664314 date "2018-10-03" @default.
- W2894664314 modified "2023-09-26" @default.
- W2894664314 title "EUV industrialization high volume manufacturing with NXE3400B" @default.
- W2894664314 doi "https://doi.org/10.1117/12.2502785" @default.
- W2894664314 hasPublicationYear "2018" @default.
- W2894664314 type Work @default.
- W2894664314 sameAs 2894664314 @default.
- W2894664314 citedByCount "8" @default.
- W2894664314 countsByYear W28946643142019 @default.
- W2894664314 countsByYear W28946643142020 @default.
- W2894664314 countsByYear W28946643142021 @default.
- W2894664314 countsByYear W28946643142022 @default.
- W2894664314 crossrefType "proceedings-article" @default.
- W2894664314 hasAuthorship W2894664314A5055377840 @default.
- W2894664314 hasConcept C111919701 @default.
- W2894664314 hasConcept C120665830 @default.
- W2894664314 hasConcept C121332964 @default.
- W2894664314 hasConcept C127413603 @default.
- W2894664314 hasConcept C136085584 @default.
- W2894664314 hasConcept C154945302 @default.
- W2894664314 hasConcept C157764524 @default.
- W2894664314 hasConcept C160671074 @default.
- W2894664314 hasConcept C162996421 @default.
- W2894664314 hasConcept C171250308 @default.
- W2894664314 hasConcept C177409738 @default.
- W2894664314 hasConcept C192209626 @default.
- W2894664314 hasConcept C192562407 @default.
- W2894664314 hasConcept C200601418 @default.
- W2894664314 hasConcept C204223013 @default.
- W2894664314 hasConcept C20556612 @default.
- W2894664314 hasConcept C207789793 @default.
- W2894664314 hasConcept C2779227376 @default.
- W2894664314 hasConcept C2779751349 @default.
- W2894664314 hasConcept C41008148 @default.
- W2894664314 hasConcept C49040817 @default.
- W2894664314 hasConcept C53524968 @default.
- W2894664314 hasConcept C555944384 @default.
- W2894664314 hasConcept C62520636 @default.
- W2894664314 hasConcept C62611344 @default.
- W2894664314 hasConcept C66938386 @default.
- W2894664314 hasConcept C76155785 @default.
- W2894664314 hasConceptScore W2894664314C111919701 @default.
- W2894664314 hasConceptScore W2894664314C120665830 @default.
- W2894664314 hasConceptScore W2894664314C121332964 @default.
- W2894664314 hasConceptScore W2894664314C127413603 @default.
- W2894664314 hasConceptScore W2894664314C136085584 @default.
- W2894664314 hasConceptScore W2894664314C154945302 @default.
- W2894664314 hasConceptScore W2894664314C157764524 @default.
- W2894664314 hasConceptScore W2894664314C160671074 @default.
- W2894664314 hasConceptScore W2894664314C162996421 @default.
- W2894664314 hasConceptScore W2894664314C171250308 @default.
- W2894664314 hasConceptScore W2894664314C177409738 @default.
- W2894664314 hasConceptScore W2894664314C192209626 @default.
- W2894664314 hasConceptScore W2894664314C192562407 @default.
- W2894664314 hasConceptScore W2894664314C200601418 @default.
- W2894664314 hasConceptScore W2894664314C204223013 @default.
- W2894664314 hasConceptScore W2894664314C20556612 @default.
- W2894664314 hasConceptScore W2894664314C207789793 @default.
- W2894664314 hasConceptScore W2894664314C2779227376 @default.
- W2894664314 hasConceptScore W2894664314C2779751349 @default.
- W2894664314 hasConceptScore W2894664314C41008148 @default.
- W2894664314 hasConceptScore W2894664314C49040817 @default.
- W2894664314 hasConceptScore W2894664314C53524968 @default.
- W2894664314 hasConceptScore W2894664314C555944384 @default.
- W2894664314 hasConceptScore W2894664314C62520636 @default.
- W2894664314 hasConceptScore W2894664314C62611344 @default.
- W2894664314 hasConceptScore W2894664314C66938386 @default.
- W2894664314 hasConceptScore W2894664314C76155785 @default.
- W2894664314 hasLocation W28946643141 @default.
- W2894664314 hasOpenAccess W2894664314 @default.
- W2894664314 hasPrimaryLocation W28946643141 @default.
- W2894664314 hasRelatedWork W1937820206 @default.
- W2894664314 hasRelatedWork W1987195402 @default.
- W2894664314 hasRelatedWork W2004027286 @default.
- W2894664314 hasRelatedWork W2021819509 @default.
- W2894664314 hasRelatedWork W2029079688 @default.
- W2894664314 hasRelatedWork W2077286051 @default.
- W2894664314 hasRelatedWork W2599482221 @default.
- W2894664314 hasRelatedWork W2793157920 @default.
- W2894664314 hasRelatedWork W2894664314 @default.
- W2894664314 hasRelatedWork W4281746028 @default.
- W2894664314 isParatext "false" @default.
- W2894664314 isRetracted "false" @default.
- W2894664314 magId "2894664314" @default.
- W2894664314 workType "article" @default.