FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2894861239> ?p ?o ?g. }

• W2894861239 abstract "The stress distributions and induced mobility gain in germanium (Ge)-based p-type MOSFETs (pMOSFETs) with an extended channel width are estimated in this paper. Several tin (Sn) concentrations of group-IV semiconductor GeSn alloys integrated with a compressive contact etching stop layer (CESL) are logically analyzed to evaluate the stress impact that results from the high lattice mismatch of embedded GeSn alloys on narrow device channels. Analytic results show that the stress intensity and corresponding mobility gain are enhanced by increasing the Sn concentration in the embedded source/drain GeSn stressors. By contrast, the performance variation of the short-channel Ge-based pMOSFET is strongly dominated by the extended width when the CESL covers the entire device. A mobility gain of up to ~124.07% is achieved for the 22-nm pMOSFET when a 100-nm extended width is considered. Moreover, the entire stress responses of high- ${k}$ /metal gate-last procedure combined with the following CESL deposition are investigated. Analytic results reveal that the stress relaxation along the channel height direction occurs after the poly gate etch process. Consequently, the adoption of a stressed CESL is demonstrated to be an effective approach to remedy the device mobility gain by stress improvement on the channel height direction." @default.
• W2894861239 created "2018-10-12" @default.
• W2894861239 creator A5021628010 @default.
• W2894861239 creator A5031942449 @default.
• W2894861239 date "2018-11-01" @default.
• W2894861239 modified "2023-10-12" @default.
• W2894861239 title "Layout Study of Strained Ge-Based pMOSFETs Integrated With S/D GeSn Alloy and CESL by Using Process-Oriented Stress Simulations" @default.
• W2894861239 cites W1975035584 @default.
• W2894861239 cites W1983463438 @default.
• W2894861239 cites W2061341183 @default.
• W2894861239 cites W2067843356 @default.
• W2894861239 cites W2067982592 @default.
• W2894861239 cites W2081776980 @default.
• W2894861239 cites W2085993575 @default.
• W2894861239 cites W2133331487 @default.
• W2894861239 cites W2286147000 @default.
• W2894861239 cites W2465796272 @default.
• W2894861239 cites W2508143901 @default.
• W2894861239 cites W2520383501 @default.
• W2894861239 cites W2528496527 @default.
• W2894861239 cites W2587822555 @default.
• W2894861239 cites W2603092491 @default.
• W2894861239 cites W2608080637 @default.
• W2894861239 cites W2612775748 @default.
• W2894861239 cites W2776118315 @default.
• W2894861239 cites W2789659675 @default.
• W2894861239 cites W2797069770 @default.
• W2894861239 cites W2805818143 @default.
• W2894861239 doi "https://doi.org/10.1109/ted.2018.2871056" @default.
• W2894861239 hasPublicationYear "2018" @default.
• W2894861239 type Work @default.
• W2894861239 sameAs 2894861239 @default.
• W2894861239 citedByCount "3" @default.
• W2894861239 countsByYear W28948612392020 @default.
• W2894861239 countsByYear W28948612392021 @default.
• W2894861239 countsByYear W28948612392022 @default.
• W2894861239 crossrefType "journal-article" @default.
• W2894861239 hasAuthorship W2894861239A5021628010 @default.
• W2894861239 hasAuthorship W2894861239A5031942449 @default.
• W2894861239 hasConcept C106782819 @default.
• W2894861239 hasConcept C119599485 @default.
• W2894861239 hasConcept C127413603 @default.
• W2894861239 hasConcept C138885662 @default.
• W2894861239 hasConcept C149912024 @default.
• W2894861239 hasConcept C159985019 @default.
• W2894861239 hasConcept C165801399 @default.
• W2894861239 hasConcept C172385210 @default.
• W2894861239 hasConcept C191897082 @default.
• W2894861239 hasConcept C192562407 @default.
• W2894861239 hasConcept C202974441 @default.
• W2894861239 hasConcept C21036866 @default.
• W2894861239 hasConcept C2361726 @default.
• W2894861239 hasConcept C2778413303 @default.
• W2894861239 hasConcept C2780026712 @default.
• W2894861239 hasConcept C41895202 @default.
• W2894861239 hasConcept C49040817 @default.
• W2894861239 hasConcept C51140833 @default.
• W2894861239 hasConcept C525849907 @default.
• W2894861239 hasConcept C544956773 @default.
• W2894861239 hasConcept C550623735 @default.
• W2894861239 hasConceptScore W2894861239C106782819 @default.
• W2894861239 hasConceptScore W2894861239C119599485 @default.
• W2894861239 hasConceptScore W2894861239C127413603 @default.
• W2894861239 hasConceptScore W2894861239C138885662 @default.
• W2894861239 hasConceptScore W2894861239C149912024 @default.
• W2894861239 hasConceptScore W2894861239C159985019 @default.
• W2894861239 hasConceptScore W2894861239C165801399 @default.
• W2894861239 hasConceptScore W2894861239C172385210 @default.
• W2894861239 hasConceptScore W2894861239C191897082 @default.
• W2894861239 hasConceptScore W2894861239C192562407 @default.
• W2894861239 hasConceptScore W2894861239C202974441 @default.
• W2894861239 hasConceptScore W2894861239C21036866 @default.
• W2894861239 hasConceptScore W2894861239C2361726 @default.
• W2894861239 hasConceptScore W2894861239C2778413303 @default.
• W2894861239 hasConceptScore W2894861239C2780026712 @default.
• W2894861239 hasConceptScore W2894861239C41895202 @default.
• W2894861239 hasConceptScore W2894861239C49040817 @default.
• W2894861239 hasConceptScore W2894861239C51140833 @default.
• W2894861239 hasConceptScore W2894861239C525849907 @default.
• W2894861239 hasConceptScore W2894861239C544956773 @default.
• W2894861239 hasConceptScore W2894861239C550623735 @default.
• W2894861239 hasFunder F4320322795 @default.
• W2894861239 hasLocation W28948612391 @default.
• W2894861239 hasOpenAccess W2894861239 @default.
• W2894861239 hasPrimaryLocation W28948612391 @default.
• W2894861239 hasRelatedWork W1992147967 @default.
• W2894861239 hasRelatedWork W2011514403 @default.
• W2894861239 hasRelatedWork W2023629640 @default.
• W2894861239 hasRelatedWork W2025907018 @default.
• W2894861239 hasRelatedWork W2029611224 @default.
• W2894861239 hasRelatedWork W2081776980 @default.
• W2894861239 hasRelatedWork W2090454364 @default.
• W2894861239 hasRelatedWork W2119565755 @default.
• W2894861239 hasRelatedWork W2162178472 @default.
• W2894861239 hasRelatedWork W2162952531 @default.
• W2894861239 hasRelatedWork W2310124757 @default.
• W2894861239 hasRelatedWork W2507313903 @default.
• W2894861239 hasRelatedWork W2528007283 @default.
• W2894861239 hasRelatedWork W2528732300 @default.
• W2894861239 hasRelatedWork W2547961720 @default.

• next