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• W2894893277 abstract "We present a unique lateral shear resonance mode excited in a microelectromechanical (MEM) disk resonator. We refer to this proposed mode as the button-like (BL) mode. The BL mode has a characteristic lateral strain profile (based on the sum of orthogonal strain components in the plane of fabrication) which resembles a shirt button, hence our choice of name for this mode. The strain profile of the BL mode is highly suited for piezoelectric transduction. Like the more widely reported wine-glass (WG) or elliptical mode, the BL mode offers feedthrough cancellation through fully differential transduction. However, compared to the WG mode, the BL mode possesses a higher coupling coefficient ( [Formula: see text]) and a higher quality ( Q ) factor for the same disk radius. These advantages make the BL mode highly attractive for realizing electrically addressed MEM resonators for liquid-phase sensing. This paper examines various design aspects pertaining to the BL mode: tether geometry, characterization setup, size of disk, and even the effect of the gap around the disk on the Q factor. The highest Q factor measured in water is 410 based on a disk with a radius of [Formula: see text]. The lowest motional resistance in water is 1.36 [Formula: see text] based on a disk with a radius of [Formula: see text]." @default.
• W2894893277 created "2018-10-12" @default.
• W2894893277 creator A5002339242 @default.
• W2894893277 creator A5009004798 @default.
• W2894893277 date "2019-03-01" @default.
• W2894893277 modified "2023-09-23" @default.
• W2894893277 title "Fully Differential Piezoelectric Button-Like Mode Disk Resonator for Liquid Phase Sensing" @default.
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• W2894893277 doi "https://doi.org/10.1109/tuffc.2018.2872923" @default.
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