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- W2895893477 abstract "Extreme ultraviolet lithography (EUVL) technology is one of the leading candidates under consideration for enabling the next generation of devices, for 7nm node and beyond. As the focus shifts to driving down the 'effective' k1 factor and enabling the second generation of EUV patterning, new techniques and methods must be developed to reduce the overall defectivity, mitigate pattern collapse, and eliminate film-related defects. In addition, CD uniformity improvements must be continued to meet patterning performance requirements. Tokyo Electron Limited (TELTM) and IBM Corporation are continuously developing manufacturing quality processes for EUV." @default.
- W2895893477 created "2018-10-26" @default.
- W2895893477 creator A5007488602 @default.
- W2895893477 creator A5030047290 @default.
- W2895893477 creator A5033211193 @default.
- W2895893477 creator A5042819972 @default.
- W2895893477 creator A5043329779 @default.
- W2895893477 creator A5053067161 @default.
- W2895893477 creator A5060516805 @default.
- W2895893477 creator A5063005173 @default.
- W2895893477 creator A5068518137 @default.
- W2895893477 creator A5074072105 @default.
- W2895893477 creator A5080778643 @default.
- W2895893477 creator A5082218114 @default.
- W2895893477 creator A5089619641 @default.
- W2895893477 date "2018-10-19" @default.
- W2895893477 modified "2023-09-25" @default.
- W2895893477 title "Track based techniques to improve high-resolution EUV patterning defectivity" @default.
- W2895893477 doi "https://doi.org/10.1117/12.2501668" @default.
- W2895893477 hasPublicationYear "2018" @default.
- W2895893477 type Work @default.
- W2895893477 sameAs 2895893477 @default.
- W2895893477 citedByCount "1" @default.
- W2895893477 countsByYear W28958934772019 @default.
- W2895893477 crossrefType "proceedings-article" @default.
- W2895893477 hasAuthorship W2895893477A5007488602 @default.
- W2895893477 hasAuthorship W2895893477A5030047290 @default.
- W2895893477 hasAuthorship W2895893477A5033211193 @default.
- W2895893477 hasAuthorship W2895893477A5042819972 @default.
- W2895893477 hasAuthorship W2895893477A5043329779 @default.
- W2895893477 hasAuthorship W2895893477A5053067161 @default.
- W2895893477 hasAuthorship W2895893477A5060516805 @default.
- W2895893477 hasAuthorship W2895893477A5063005173 @default.
- W2895893477 hasAuthorship W2895893477A5068518137 @default.
- W2895893477 hasAuthorship W2895893477A5074072105 @default.
- W2895893477 hasAuthorship W2895893477A5080778643 @default.
- W2895893477 hasAuthorship W2895893477A5082218114 @default.
- W2895893477 hasAuthorship W2895893477A5089619641 @default.
- W2895893477 hasConcept C111919701 @default.
- W2895893477 hasConcept C120665830 @default.
- W2895893477 hasConcept C121332964 @default.
- W2895893477 hasConcept C127413603 @default.
- W2895893477 hasConcept C146024833 @default.
- W2895893477 hasConcept C162996421 @default.
- W2895893477 hasConcept C171250308 @default.
- W2895893477 hasConcept C177409738 @default.
- W2895893477 hasConcept C192209626 @default.
- W2895893477 hasConcept C192562407 @default.
- W2895893477 hasConcept C204223013 @default.
- W2895893477 hasConcept C2779227376 @default.
- W2895893477 hasConcept C41008148 @default.
- W2895893477 hasConcept C49040817 @default.
- W2895893477 hasConcept C520434653 @default.
- W2895893477 hasConcept C53524968 @default.
- W2895893477 hasConcept C62611344 @default.
- W2895893477 hasConcept C66938386 @default.
- W2895893477 hasConcept C70388272 @default.
- W2895893477 hasConcept C89992363 @default.
- W2895893477 hasConceptScore W2895893477C111919701 @default.
- W2895893477 hasConceptScore W2895893477C120665830 @default.
- W2895893477 hasConceptScore W2895893477C121332964 @default.
- W2895893477 hasConceptScore W2895893477C127413603 @default.
- W2895893477 hasConceptScore W2895893477C146024833 @default.
- W2895893477 hasConceptScore W2895893477C162996421 @default.
- W2895893477 hasConceptScore W2895893477C171250308 @default.
- W2895893477 hasConceptScore W2895893477C177409738 @default.
- W2895893477 hasConceptScore W2895893477C192209626 @default.
- W2895893477 hasConceptScore W2895893477C192562407 @default.
- W2895893477 hasConceptScore W2895893477C204223013 @default.
- W2895893477 hasConceptScore W2895893477C2779227376 @default.
- W2895893477 hasConceptScore W2895893477C41008148 @default.
- W2895893477 hasConceptScore W2895893477C49040817 @default.
- W2895893477 hasConceptScore W2895893477C520434653 @default.
- W2895893477 hasConceptScore W2895893477C53524968 @default.
- W2895893477 hasConceptScore W2895893477C62611344 @default.
- W2895893477 hasConceptScore W2895893477C66938386 @default.
- W2895893477 hasConceptScore W2895893477C70388272 @default.
- W2895893477 hasConceptScore W2895893477C89992363 @default.
- W2895893477 hasLocation W28958934771 @default.
- W2895893477 hasOpenAccess W2895893477 @default.
- W2895893477 hasPrimaryLocation W28958934771 @default.
- W2895893477 hasRelatedWork W1980833396 @default.
- W2895893477 hasRelatedWork W1981486280 @default.
- W2895893477 hasRelatedWork W2045803311 @default.
- W2895893477 hasRelatedWork W2078133512 @default.
- W2895893477 hasRelatedWork W2335609010 @default.
- W2895893477 hasRelatedWork W2382178910 @default.
- W2895893477 hasRelatedWork W2601240497 @default.
- W2895893477 hasRelatedWork W2895893477 @default.
- W2895893477 hasRelatedWork W4224257614 @default.
- W2895893477 hasRelatedWork W4224270470 @default.
- W2895893477 isParatext "false" @default.
- W2895893477 isRetracted "false" @default.
- W2895893477 magId "2895893477" @default.
- W2895893477 workType "article" @default.