Matches in SemOpenAlex for { <https://semopenalex.org/work/W2895909877> ?p ?o ?g. }
Showing items 1 to 90 of
90
with 100 items per page.
- W2895909877 endingPage "4785" @default.
- W2895909877 startingPage "4780" @default.
- W2895909877 abstract "The 3-D technology computer-aided design simulations were performed with four metal-gate materials (i.e., titanium nitride, tungsten nitride, tantalum nitride, and molybdenum nitride) to quantitatively estimate the magnitude of work-function variation (WFV)-induced threshold-voltage variation (WFV-induced $sigma {V}_{mathrm{TH}}$ ) in high- $kappa $ /metal-gate (HK/MG) MOSFETs [e.g., fin-shaped field-effect transistor (FinFET) and fully depleted silicon-on-insulator MOSFETs]. We found that the extended gate area effect in FinFETs extensively varied depending on the gate materials used. In order to substantially suppress the WFV-induced $sigma {V}_{mathrm{TH}}$ in HK/MG complementary metal–oxide–semiconductor technology, a new metal-gate material with the following characteristics should be developed: 1) higher standard deviation of probability for all grains and 2) lower standard deviation of WF values for all grains." @default.
- W2895909877 created "2018-10-26" @default.
- W2895909877 creator A5039545794 @default.
- W2895909877 creator A5053024878 @default.
- W2895909877 creator A5055293963 @default.
- W2895909877 date "2018-11-01" @default.
- W2895909877 modified "2023-10-08" @default.
- W2895909877 title "Impact of the Metal-Gate Material Properties in FinFET (Versus FD-SOI MOSFET) on High- <inline-formula> <tex-math notation=LaTeX>$kappa$ </tex-math> </inline-formula>/Metal-Gate Work-Function Variation" @default.
- W2895909877 cites W1973417146 @default.
- W2895909877 cites W2009361819 @default.
- W2895909877 cites W2025385502 @default.
- W2895909877 cites W2047717019 @default.
- W2895909877 cites W2048782890 @default.
- W2895909877 cites W2080745628 @default.
- W2895909877 cites W2140823559 @default.
- W2895909877 cites W2413234167 @default.
- W2895909877 cites W2542396569 @default.
- W2895909877 doi "https://doi.org/10.1109/ted.2018.2872586" @default.
- W2895909877 hasPublicationYear "2018" @default.
- W2895909877 type Work @default.
- W2895909877 sameAs 2895909877 @default.
- W2895909877 citedByCount "10" @default.
- W2895909877 countsByYear W28959098772019 @default.
- W2895909877 countsByYear W28959098772020 @default.
- W2895909877 countsByYear W28959098772021 @default.
- W2895909877 countsByYear W28959098772022 @default.
- W2895909877 countsByYear W28959098772023 @default.
- W2895909877 crossrefType "journal-article" @default.
- W2895909877 hasAuthorship W2895909877A5039545794 @default.
- W2895909877 hasAuthorship W2895909877A5053024878 @default.
- W2895909877 hasAuthorship W2895909877A5055293963 @default.
- W2895909877 hasConcept C121332964 @default.
- W2895909877 hasConcept C165801399 @default.
- W2895909877 hasConcept C172385210 @default.
- W2895909877 hasConcept C191897082 @default.
- W2895909877 hasConcept C192562407 @default.
- W2895909877 hasConcept C2361726 @default.
- W2895909877 hasConcept C2524010 @default.
- W2895909877 hasConcept C2778413303 @default.
- W2895909877 hasConcept C2778724333 @default.
- W2895909877 hasConcept C33923547 @default.
- W2895909877 hasConcept C45357846 @default.
- W2895909877 hasConcept C49040817 @default.
- W2895909877 hasConcept C51140833 @default.
- W2895909877 hasConcept C53143962 @default.
- W2895909877 hasConcept C544153396 @default.
- W2895909877 hasConcept C544956773 @default.
- W2895909877 hasConcept C62520636 @default.
- W2895909877 hasConcept C94375191 @default.
- W2895909877 hasConceptScore W2895909877C121332964 @default.
- W2895909877 hasConceptScore W2895909877C165801399 @default.
- W2895909877 hasConceptScore W2895909877C172385210 @default.
- W2895909877 hasConceptScore W2895909877C191897082 @default.
- W2895909877 hasConceptScore W2895909877C192562407 @default.
- W2895909877 hasConceptScore W2895909877C2361726 @default.
- W2895909877 hasConceptScore W2895909877C2524010 @default.
- W2895909877 hasConceptScore W2895909877C2778413303 @default.
- W2895909877 hasConceptScore W2895909877C2778724333 @default.
- W2895909877 hasConceptScore W2895909877C33923547 @default.
- W2895909877 hasConceptScore W2895909877C45357846 @default.
- W2895909877 hasConceptScore W2895909877C49040817 @default.
- W2895909877 hasConceptScore W2895909877C51140833 @default.
- W2895909877 hasConceptScore W2895909877C53143962 @default.
- W2895909877 hasConceptScore W2895909877C544153396 @default.
- W2895909877 hasConceptScore W2895909877C544956773 @default.
- W2895909877 hasConceptScore W2895909877C62520636 @default.
- W2895909877 hasConceptScore W2895909877C94375191 @default.
- W2895909877 hasFunder F4320322120 @default.
- W2895909877 hasFunder F4320335199 @default.
- W2895909877 hasIssue "11" @default.
- W2895909877 hasLocation W28959098771 @default.
- W2895909877 hasOpenAccess W2895909877 @default.
- W2895909877 hasPrimaryLocation W28959098771 @default.
- W2895909877 hasRelatedWork W1849047430 @default.
- W2895909877 hasRelatedWork W1947033256 @default.
- W2895909877 hasRelatedWork W2015628779 @default.
- W2895909877 hasRelatedWork W2019111621 @default.
- W2895909877 hasRelatedWork W2115235293 @default.
- W2895909877 hasRelatedWork W2123362924 @default.
- W2895909877 hasRelatedWork W2165683345 @default.
- W2895909877 hasRelatedWork W2895909877 @default.
- W2895909877 hasRelatedWork W2947640444 @default.
- W2895909877 hasRelatedWork W4299308015 @default.
- W2895909877 hasVolume "65" @default.
- W2895909877 isParatext "false" @default.
- W2895909877 isRetracted "false" @default.
- W2895909877 magId "2895909877" @default.
- W2895909877 workType "article" @default.