Matches in SemOpenAlex for { <https://semopenalex.org/work/W2895957076> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W2895957076 abstract "We propose a new design for a low VΠL accumulation optical modulator using 3-Dimensional (3D) Fin-waveguides on double Silicon-On-Insulator (SOI). We have introduced and demonstrated a novel, self-aligned patterning process to pattern the bottom SOI layer using anisotropic wet etching." @default.
- W2895957076 created "2018-10-26" @default.
- W2895957076 creator A5012385532 @default.
- W2895957076 creator A5013322177 @default.
- W2895957076 creator A5014966693 @default.
- W2895957076 creator A5033338038 @default.
- W2895957076 creator A5041960417 @default.
- W2895957076 creator A5043624207 @default.
- W2895957076 creator A5045455576 @default.
- W2895957076 creator A5052109754 @default.
- W2895957076 creator A5059643393 @default.
- W2895957076 creator A5063669218 @default.
- W2895957076 creator A5064245500 @default.
- W2895957076 creator A5069817397 @default.
- W2895957076 creator A5075330139 @default.
- W2895957076 date "2018-08-01" @default.
- W2895957076 modified "2023-09-23" @default.
- W2895957076 title "3D Fin Waveguide on 10nm Gate Oxide Bonded Double-SOI for Low VΠL Accumulation Modulator" @default.
- W2895957076 doi "https://doi.org/10.1109/group4.2018.8478693" @default.
- W2895957076 hasPublicationYear "2018" @default.
- W2895957076 type Work @default.
- W2895957076 sameAs 2895957076 @default.
- W2895957076 citedByCount "0" @default.
- W2895957076 crossrefType "proceedings-article" @default.
- W2895957076 hasAuthorship W2895957076A5012385532 @default.
- W2895957076 hasAuthorship W2895957076A5013322177 @default.
- W2895957076 hasAuthorship W2895957076A5014966693 @default.
- W2895957076 hasAuthorship W2895957076A5033338038 @default.
- W2895957076 hasAuthorship W2895957076A5041960417 @default.
- W2895957076 hasAuthorship W2895957076A5043624207 @default.
- W2895957076 hasAuthorship W2895957076A5045455576 @default.
- W2895957076 hasAuthorship W2895957076A5052109754 @default.
- W2895957076 hasAuthorship W2895957076A5059643393 @default.
- W2895957076 hasAuthorship W2895957076A5063669218 @default.
- W2895957076 hasAuthorship W2895957076A5064245500 @default.
- W2895957076 hasAuthorship W2895957076A5069817397 @default.
- W2895957076 hasAuthorship W2895957076A5075330139 @default.
- W2895957076 hasConcept C100460472 @default.
- W2895957076 hasConcept C120665830 @default.
- W2895957076 hasConcept C121332964 @default.
- W2895957076 hasConcept C159985019 @default.
- W2895957076 hasConcept C171250308 @default.
- W2895957076 hasConcept C192562407 @default.
- W2895957076 hasConcept C200687136 @default.
- W2895957076 hasConcept C2779227376 @default.
- W2895957076 hasConcept C49040817 @default.
- W2895957076 hasConcept C53143962 @default.
- W2895957076 hasConcept C544956773 @default.
- W2895957076 hasConcept C91721477 @default.
- W2895957076 hasConceptScore W2895957076C100460472 @default.
- W2895957076 hasConceptScore W2895957076C120665830 @default.
- W2895957076 hasConceptScore W2895957076C121332964 @default.
- W2895957076 hasConceptScore W2895957076C159985019 @default.
- W2895957076 hasConceptScore W2895957076C171250308 @default.
- W2895957076 hasConceptScore W2895957076C192562407 @default.
- W2895957076 hasConceptScore W2895957076C200687136 @default.
- W2895957076 hasConceptScore W2895957076C2779227376 @default.
- W2895957076 hasConceptScore W2895957076C49040817 @default.
- W2895957076 hasConceptScore W2895957076C53143962 @default.
- W2895957076 hasConceptScore W2895957076C544956773 @default.
- W2895957076 hasConceptScore W2895957076C91721477 @default.
- W2895957076 hasLocation W28959570761 @default.
- W2895957076 hasOpenAccess W2895957076 @default.
- W2895957076 hasPrimaryLocation W28959570761 @default.
- W2895957076 hasRelatedWork W1504577989 @default.
- W2895957076 hasRelatedWork W1583011540 @default.
- W2895957076 hasRelatedWork W2001608503 @default.
- W2895957076 hasRelatedWork W2012097588 @default.
- W2895957076 hasRelatedWork W2043706639 @default.
- W2895957076 hasRelatedWork W2053520333 @default.
- W2895957076 hasRelatedWork W2139852983 @default.
- W2895957076 hasRelatedWork W2550715375 @default.
- W2895957076 hasRelatedWork W2902337412 @default.
- W2895957076 hasRelatedWork W2908570144 @default.
- W2895957076 isParatext "false" @default.
- W2895957076 isRetracted "false" @default.
- W2895957076 magId "2895957076" @default.
- W2895957076 workType "article" @default.