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- W2896032166 abstract "A biocompatible sensor chip consists of a 200 nm conducting platinum layer between a glass substrate and a 200 nm tantalum pentoxide layer as insulator on top. The irradiation of the biochip from the Ta2O5 side with ultra-short laser pulses (660 fs) at a wavelength of 1053 nm leads to a selective ablation of the Ta2O5 layer from the platinum. The ablation threshold for the removal of the Ta2O5 layer is about 0.08 J/cm². Moreover, the Ta2O5 lifts-off in form of an intact disk at a fluence of 0.14 J/cm². For deeper understanding of the ablation mechanisms, a pump-probe microscopy setup was utilized to record a stop-motion movie of the lift-off process. The setup utilizes an optically combined with an electronically delayed probe pulse. For the first time to our knowledge the laser lift-off of a transparent oxide could be recorded over the complete temporal dynamic range. The movies reveal that an intact disk leaves the hole after a few 10 ns. At higher fluences of about 0.20 J/cm² the disk disrupts in several particles at about 40 ns.A biocompatible sensor chip consists of a 200 nm conducting platinum layer between a glass substrate and a 200 nm tantalum pentoxide layer as insulator on top. The irradiation of the biochip from the Ta2O5 side with ultra-short laser pulses (660 fs) at a wavelength of 1053 nm leads to a selective ablation of the Ta2O5 layer from the platinum. The ablation threshold for the removal of the Ta2O5 layer is about 0.08 J/cm². Moreover, the Ta2O5 lifts-off in form of an intact disk at a fluence of 0.14 J/cm². For deeper understanding of the ablation mechanisms, a pump-probe microscopy setup was utilized to record a stop-motion movie of the lift-off process. The setup utilizes an optically combined with an electronically delayed probe pulse. For the first time to our knowledge the laser lift-off of a transparent oxide could be recorded over the complete temporal dynamic range. The movies reveal that an intact disk leaves the hole after a few 10 ns. At higher fluences of about 0.20 J/cm² the disk disrupts in sever..." @default.
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- W2896032166 date "2012-01-01" @default.
- W2896032166 modified "2023-09-26" @default.
- W2896032166 title "Selective femtosecond laser structuring of a platinum/tantalum pentoxide thin film layer system by induced laser ablation investigated with pump-probe microscopy" @default.
- W2896032166 doi "https://doi.org/10.2351/1.5062550" @default.
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