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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2896041943> ?p ?o ?g. }

• W2896041943 endingPage "P594" @default.
• W2896041943 startingPage "P588" @default.
• W2896041943 abstract "As integrated circuits for high performance CMOS devices scale down to < = 10 nm dimension, further reductions in capacitance are vitally important for device performance. It is important to reduce capacitance in the FEOL and BEOL device structures while maintaining fabrication integration robustness. This paper presents an overview of material and process technology requirements for FEOL air spacer and BEOL air gap formation using a pinch off deposition approach. These approaches utilize established dielectric materials and processes such as Plasma CVD of SiN, SiCN, SiCOH, pSiCOH, in the formation of the air spacer/air gap. The selection of these dielectric materials and processes has a large impact in the void (gap) dimension and volume. The void dimension and volume in airgap/air spacer structures can be controlled with various dielectric deposition processes and materials to facilitate subsequent process fabrication steps, and ultimately to build a robust device with substantial capacitance reduction." @default.
• W2896041943 created "2018-10-26" @default.
• W2896041943 creator A5002954357 @default.
• W2896041943 creator A5005603215 @default.
• W2896041943 creator A5010541239 @default.
• W2896041943 creator A5023401890 @default.
• W2896041943 creator A5034867801 @default.
• W2896041943 creator A5042290434 @default.
• W2896041943 creator A5045386914 @default.
• W2896041943 creator A5053328409 @default.
• W2896041943 creator A5063546578 @default.
• W2896041943 creator A5080012084 @default.
• W2896041943 date "2018-01-01" @default.
• W2896041943 modified "2023-09-27" @default.
• W2896041943 title "Pinch Off Plasma CVD Deposition Process and Material Technology for Nano-Device Air Gap/Spacer Formation" @default.
• W2896041943 cites W1974140104 @default.
• W2896041943 cites W1980214871 @default.
• W2896041943 cites W1981130644 @default.
• W2896041943 cites W1986997640 @default.
• W2896041943 cites W1987721797 @default.
• W2896041943 cites W2064830413 @default.
• W2896041943 cites W2070126818 @default.
• W2896041943 cites W2091900811 @default.
• W2896041943 cites W2130689955 @default.
• W2896041943 cites W2156901691 @default.
• W2896041943 cites W2171489255 @default.
• W2896041943 cites W2286513767 @default.
• W2896041943 cites W2579812018 @default.
• W2896041943 cites W2588836563 @default.
• W2896041943 cites W2619605557 @default.
• W2896041943 cites W2761404278 @default.
• W2896041943 cites W2768046739 @default.
• W2896041943 doi "https://doi.org/10.1149/2.0021811jss" @default.
• W2896041943 hasPublicationYear "2018" @default.
• W2896041943 type Work @default.
• W2896041943 sameAs 2896041943 @default.
• W2896041943 citedByCount "4" @default.
• W2896041943 countsByYear W28960419432020 @default.
• W2896041943 countsByYear W28960419432021 @default.
• W2896041943 countsByYear W28960419432022 @default.
• W2896041943 countsByYear W28960419432023 @default.
• W2896041943 crossrefType "journal-article" @default.
• W2896041943 hasAuthorship W2896041943A5002954357 @default.
• W2896041943 hasAuthorship W2896041943A5005603215 @default.
• W2896041943 hasAuthorship W2896041943A5010541239 @default.
• W2896041943 hasAuthorship W2896041943A5023401890 @default.
• W2896041943 hasAuthorship W2896041943A5034867801 @default.
• W2896041943 hasAuthorship W2896041943A5042290434 @default.
• W2896041943 hasAuthorship W2896041943A5045386914 @default.
• W2896041943 hasAuthorship W2896041943A5053328409 @default.
• W2896041943 hasAuthorship W2896041943A5063546578 @default.
• W2896041943 hasAuthorship W2896041943A5080012084 @default.
• W2896041943 hasBestOaLocation W28960419431 @default.
• W2896041943 hasConcept C127413603 @default.
• W2896041943 hasConcept C133386390 @default.
• W2896041943 hasConcept C136525101 @default.
• W2896041943 hasConcept C142724271 @default.
• W2896041943 hasConcept C147789679 @default.
• W2896041943 hasConcept C159985019 @default.
• W2896041943 hasConcept C171250308 @default.
• W2896041943 hasConcept C17525397 @default.
• W2896041943 hasConcept C185592680 @default.
• W2896041943 hasConcept C192562407 @default.
• W2896041943 hasConcept C204787440 @default.
• W2896041943 hasConcept C2779772531 @default.
• W2896041943 hasConcept C30066665 @default.
• W2896041943 hasConcept C49040817 @default.
• W2896041943 hasConcept C50587689 @default.
• W2896041943 hasConcept C61696701 @default.
• W2896041943 hasConcept C71924100 @default.
• W2896041943 hasConceptScore W2896041943C127413603 @default.
• W2896041943 hasConceptScore W2896041943C133386390 @default.
• W2896041943 hasConceptScore W2896041943C136525101 @default.
• W2896041943 hasConceptScore W2896041943C142724271 @default.
• W2896041943 hasConceptScore W2896041943C147789679 @default.
• W2896041943 hasConceptScore W2896041943C159985019 @default.
• W2896041943 hasConceptScore W2896041943C171250308 @default.
• W2896041943 hasConceptScore W2896041943C17525397 @default.
• W2896041943 hasConceptScore W2896041943C185592680 @default.
• W2896041943 hasConceptScore W2896041943C192562407 @default.
• W2896041943 hasConceptScore W2896041943C204787440 @default.
• W2896041943 hasConceptScore W2896041943C2779772531 @default.
• W2896041943 hasConceptScore W2896041943C30066665 @default.
• W2896041943 hasConceptScore W2896041943C49040817 @default.
• W2896041943 hasConceptScore W2896041943C50587689 @default.
• W2896041943 hasConceptScore W2896041943C61696701 @default.
• W2896041943 hasConceptScore W2896041943C71924100 @default.
• W2896041943 hasFunder F4320307762 @default.
• W2896041943 hasIssue "10" @default.
• W2896041943 hasLocation W28960419431 @default.
• W2896041943 hasOpenAccess W2896041943 @default.
• W2896041943 hasPrimaryLocation W28960419431 @default.
• W2896041943 hasRelatedWork W1224762622 @default.
• W2896041943 hasRelatedWork W1516441312 @default.
• W2896041943 hasRelatedWork W1958714384 @default.
• W2896041943 hasRelatedWork W2043673973 @default.
• W2896041943 hasRelatedWork W2092872563 @default.
• W2896041943 hasRelatedWork W2126943687 @default.

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