Matches in SemOpenAlex for { <https://semopenalex.org/work/W2896072047> ?p ?o ?g. }
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- W2896072047 endingPage "53" @default.
- W2896072047 startingPage "48" @default.
- W2896072047 abstract "Generation of particle defects in semiconductor manufacturing is inevitable, but it has to be minimized to enhance IC yield. There are various causes for the generation of particle defects in different semiconductor manufacturing processes, such as diffusion, thin-film deposition, lithography, etch, and clean. In this paper, primary defect generation mechanisms in thin-film deposition processes, such as atomic layer deposition TiN, radio frequency physical vapor deposition Ti, and physical vapor deposition TiN, are discussed. Various strategies, such as periodic clean optimization, on-load clean, idle pasting, periodic pasting optimization, kit life optimization, target burning optimization, and kit hardware selection that reduce the generation of defects in the thin-film deposition processes are presented. This paper also discusses hardware-induced surface defect and solutions to reduce them." @default.
- W2896072047 created "2018-10-26" @default.
- W2896072047 creator A5004037047 @default.
- W2896072047 creator A5037741969 @default.
- W2896072047 creator A5042720048 @default.
- W2896072047 creator A5059409050 @default.
- W2896072047 creator A5080327267 @default.
- W2896072047 creator A5081911055 @default.
- W2896072047 date "2019-02-01" @default.
- W2896072047 modified "2023-09-27" @default.
- W2896072047 title "Strategies for Reducing Particle Defects in Ti and TiN Thin-Film Deposition Processes" @default.
- W2896072047 cites W1982132988 @default.
- W2896072047 cites W2000283837 @default.
- W2896072047 cites W2025516544 @default.
- W2896072047 cites W2089672052 @default.
- W2896072047 cites W2143855218 @default.
- W2896072047 cites W2149886315 @default.
- W2896072047 cites W2150816504 @default.
- W2896072047 doi "https://doi.org/10.1109/tsm.2018.2876463" @default.
- W2896072047 hasPublicationYear "2019" @default.
- W2896072047 type Work @default.
- W2896072047 sameAs 2896072047 @default.
- W2896072047 citedByCount "3" @default.
- W2896072047 countsByYear W28960720472020 @default.
- W2896072047 countsByYear W28960720472021 @default.
- W2896072047 countsByYear W28960720472022 @default.
- W2896072047 crossrefType "journal-article" @default.
- W2896072047 hasAuthorship W2896072047A5004037047 @default.
- W2896072047 hasAuthorship W2896072047A5037741969 @default.
- W2896072047 hasAuthorship W2896072047A5042720048 @default.
- W2896072047 hasAuthorship W2896072047A5059409050 @default.
- W2896072047 hasAuthorship W2896072047A5080327267 @default.
- W2896072047 hasAuthorship W2896072047A5081911055 @default.
- W2896072047 hasConcept C108225325 @default.
- W2896072047 hasConcept C111368507 @default.
- W2896072047 hasConcept C127313418 @default.
- W2896072047 hasConcept C127413603 @default.
- W2896072047 hasConcept C151730666 @default.
- W2896072047 hasConcept C160671074 @default.
- W2896072047 hasConcept C171250308 @default.
- W2896072047 hasConcept C19067145 @default.
- W2896072047 hasConcept C191897082 @default.
- W2896072047 hasConcept C192562407 @default.
- W2896072047 hasConcept C204223013 @default.
- W2896072047 hasConcept C24326235 @default.
- W2896072047 hasConcept C2778517922 @default.
- W2896072047 hasConcept C2779227376 @default.
- W2896072047 hasConcept C2816523 @default.
- W2896072047 hasConcept C49040817 @default.
- W2896072047 hasConcept C51576277 @default.
- W2896072047 hasConcept C525849907 @default.
- W2896072047 hasConcept C57410435 @default.
- W2896072047 hasConcept C64297162 @default.
- W2896072047 hasConcept C66018809 @default.
- W2896072047 hasConcept C69544855 @default.
- W2896072047 hasConcept C86803240 @default.
- W2896072047 hasConceptScore W2896072047C108225325 @default.
- W2896072047 hasConceptScore W2896072047C111368507 @default.
- W2896072047 hasConceptScore W2896072047C127313418 @default.
- W2896072047 hasConceptScore W2896072047C127413603 @default.
- W2896072047 hasConceptScore W2896072047C151730666 @default.
- W2896072047 hasConceptScore W2896072047C160671074 @default.
- W2896072047 hasConceptScore W2896072047C171250308 @default.
- W2896072047 hasConceptScore W2896072047C19067145 @default.
- W2896072047 hasConceptScore W2896072047C191897082 @default.
- W2896072047 hasConceptScore W2896072047C192562407 @default.
- W2896072047 hasConceptScore W2896072047C204223013 @default.
- W2896072047 hasConceptScore W2896072047C24326235 @default.
- W2896072047 hasConceptScore W2896072047C2778517922 @default.
- W2896072047 hasConceptScore W2896072047C2779227376 @default.
- W2896072047 hasConceptScore W2896072047C2816523 @default.
- W2896072047 hasConceptScore W2896072047C49040817 @default.
- W2896072047 hasConceptScore W2896072047C51576277 @default.
- W2896072047 hasConceptScore W2896072047C525849907 @default.
- W2896072047 hasConceptScore W2896072047C57410435 @default.
- W2896072047 hasConceptScore W2896072047C64297162 @default.
- W2896072047 hasConceptScore W2896072047C66018809 @default.
- W2896072047 hasConceptScore W2896072047C69544855 @default.
- W2896072047 hasConceptScore W2896072047C86803240 @default.
- W2896072047 hasIssue "1" @default.
- W2896072047 hasLocation W28960720471 @default.
- W2896072047 hasOpenAccess W2896072047 @default.
- W2896072047 hasPrimaryLocation W28960720471 @default.
- W2896072047 hasRelatedWork W2012445711 @default.
- W2896072047 hasRelatedWork W2896072047 @default.
- W2896072047 hasRelatedWork W2901254677 @default.
- W2896072047 hasRelatedWork W2909146734 @default.
- W2896072047 hasRelatedWork W3010396591 @default.
- W2896072047 hasRelatedWork W3048662541 @default.
- W2896072047 hasRelatedWork W3177905752 @default.
- W2896072047 hasRelatedWork W4309371371 @default.
- W2896072047 hasRelatedWork W4312637428 @default.
- W2896072047 hasRelatedWork W4313647008 @default.
- W2896072047 hasVolume "32" @default.
- W2896072047 isParatext "false" @default.
- W2896072047 isRetracted "false" @default.
- W2896072047 magId "2896072047" @default.
- W2896072047 workType "article" @default.