FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2896172947> ?p ?o ?g. }

• W2896172947 abstract "Smart devices have been fabricated based on design concept of multiple layer structures which require through silicon vias to transfer electric signals between stacked layers. Because even a single defect leads to fail of the packaged devices, the dimensions of the through silicon vias are needed to be measured through whole sampling inspection process. For that, a novel hybrid optical probe working based on optical interferometry, confocal microscopy and optical microscopy was proposed and realized for enhancing inspection efficiency in this report. The optical microscope was utilized for coarsely monitoring the specimen in a large field of view, and the other methods of interferometry and confocal microscopy were used to measure dimensions of small features with high speed by eliminating time-consuming process of the vertical scanning. Owing to the importance of the reliability, the uncertainty evaluation of the proposed method was fulfilled, which offers a practical example for estimating the performance of inspection machines operating with numerous principles at semiconductor manufacturing sites. According to the measurement results, the mean values of the diameter and depth were 40.420 µm and 5.954 µm with the expanded uncertainty of 0.050 µm (k = 2) and 0.208 µm (k = 2), respectively." @default.
• W2896172947 created "2018-10-26" @default.
• W2896172947 creator A5069289446 @default.
• W2896172947 creator A5077253039 @default.
• W2896172947 creator A5085585566 @default.
• W2896172947 creator A5085590465 @default.
• W2896172947 date "2018-10-26" @default.
• W2896172947 modified "2023-10-12" @default.
• W2896172947 title "A Hybrid Non-destructive Measuring Method of Three-dimensional Profile of Through Silicon Vias for Realization of Smart Devices" @default.
• W2896172947 cites W1970204651 @default.
• W2896172947 cites W1980220391 @default.
• W2896172947 cites W1983276156 @default.
• W2896172947 cites W1988812210 @default.
• W2896172947 cites W1998290008 @default.
• W2896172947 cites W2000226148 @default.
• W2896172947 cites W2006506540 @default.
• W2896172947 cites W2012100795 @default.
• W2896172947 cites W2013955378 @default.
• W2896172947 cites W2020185014 @default.
• W2896172947 cites W2023787605 @default.
• W2896172947 cites W2026012664 @default.
• W2896172947 cites W2028478313 @default.
• W2896172947 cites W2028514410 @default.
• W2896172947 cites W2028702032 @default.
• W2896172947 cites W2029071012 @default.
• W2896172947 cites W2032128953 @default.
• W2896172947 cites W2038583115 @default.
• W2896172947 cites W2038687409 @default.
• W2896172947 cites W2046311181 @default.
• W2896172947 cites W2046933128 @default.
• W2896172947 cites W2053802602 @default.
• W2896172947 cites W2054610018 @default.
• W2896172947 cites W2056197311 @default.
• W2896172947 cites W2058194981 @default.
• W2896172947 cites W2066815991 @default.
• W2896172947 cites W2068400146 @default.
• W2896172947 cites W2084035250 @default.
• W2896172947 cites W2086943218 @default.
• W2896172947 cites W2094959484 @default.
• W2896172947 cites W2108593541 @default.
• W2896172947 cites W2114448470 @default.
• W2896172947 cites W2130658442 @default.
• W2896172947 cites W2132178399 @default.
• W2896172947 cites W2132954806 @default.
• W2896172947 cites W2144223752 @default.
• W2896172947 cites W2153957768 @default.
• W2896172947 cites W2160031042 @default.
• W2896172947 cites W2163322630 @default.
• W2896172947 cites W2263719861 @default.
• W2896172947 cites W2277206483 @default.
• W2896172947 cites W2536734247 @default.
• W2896172947 cites W2588321670 @default.
• W2896172947 cites W2593763592 @default.
• W2896172947 cites W2618826064 @default.
• W2896172947 cites W2794261516 @default.
• W2896172947 cites W2802475784 @default.
• W2896172947 doi "https://doi.org/10.1038/s41598-018-33728-w" @default.
• W2896172947 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/6203746" @default.
• W2896172947 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/30367137" @default.
• W2896172947 hasPublicationYear "2018" @default.
• W2896172947 type Work @default.
• W2896172947 sameAs 2896172947 @default.
• W2896172947 citedByCount "9" @default.
• W2896172947 countsByYear W28961729472019 @default.
• W2896172947 countsByYear W28961729472021 @default.
• W2896172947 countsByYear W28961729472022 @default.
• W2896172947 countsByYear W28961729472023 @default.
• W2896172947 crossrefType "journal-article" @default.
• W2896172947 hasAuthorship W2896172947A5069289446 @default.
• W2896172947 hasAuthorship W2896172947A5077253039 @default.
• W2896172947 hasAuthorship W2896172947A5085585566 @default.
• W2896172947 hasAuthorship W2896172947A5085590465 @default.
• W2896172947 hasBestOaLocation W28961729471 @default.
• W2896172947 hasConcept C105795698 @default.
• W2896172947 hasConcept C111919701 @default.
• W2896172947 hasConcept C120665830 @default.
• W2896172947 hasConcept C121332964 @default.
• W2896172947 hasConcept C136009344 @default.
• W2896172947 hasConcept C147080431 @default.
• W2896172947 hasConcept C159985019 @default.
• W2896172947 hasConcept C163258240 @default.
• W2896172947 hasConcept C166689943 @default.
• W2896172947 hasConcept C192562407 @default.
• W2896172947 hasConcept C26771246 @default.
• W2896172947 hasConcept C2779178360 @default.
• W2896172947 hasConcept C2781089630 @default.
• W2896172947 hasConcept C33923547 @default.
• W2896172947 hasConcept C41008148 @default.
• W2896172947 hasConcept C43214815 @default.
• W2896172947 hasConcept C49040817 @default.
• W2896172947 hasConcept C544956773 @default.
• W2896172947 hasConcept C62520636 @default.
• W2896172947 hasConcept C67649825 @default.
• W2896172947 hasConcept C77017923 @default.
• W2896172947 hasConcept C98045186 @default.
• W2896172947 hasConceptScore W2896172947C105795698 @default.
• W2896172947 hasConceptScore W2896172947C111919701 @default.
• W2896172947 hasConceptScore W2896172947C120665830 @default.
• W2896172947 hasConceptScore W2896172947C121332964 @default.
• W2896172947 hasConceptScore W2896172947C136009344 @default.

• next