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- W2896247877 abstract "Metal-organic chemical vapor deposition (MO-CVD) is a vapor phase process for growing thin multilayer semiconductor films by pyrolysis of metal alkyls and hydrides. The MO-CVD process provides excellent control over the thickness, uniformity, doping density, alloy composition and interface quality of the grown films. Growth rates of 2500 to 3000 A/min permit layers of 50 A or less to be grown reproducibly. These characteristics make this technology especially suitable for economic and reproducible production of large uniform wafers of multilayer semiconductor laser material.Metal-organic chemical vapor deposition (MO-CVD) is a vapor phase process for growing thin multilayer semiconductor films by pyrolysis of metal alkyls and hydrides. The MO-CVD process provides excellent control over the thickness, uniformity, doping density, alloy composition and interface quality of the grown films. Growth rates of 2500 to 3000 A/min permit layers of 50 A or less to be grown reproducibly. These characteristics make this technology especially suitable for economic and reproducible production of large uniform wafers of multilayer semiconductor laser material." @default.
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- W2896247877 date "1982-01-01" @default.
- W2896247877 modified "2023-09-23" @default.
- W2896247877 title "Semiconductor lasers grown by MO-CVD" @default.
- W2896247877 doi "https://doi.org/10.2351/1.5057344" @default.
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