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- W2896639393 abstract "Micro via interconnector is the most important part in three dimension (3D) packaging of integrated circuit (IC) devices. The reliability of the micro via interconnector is the core issue of 3D packaging. It is an innovative idea to fill the micro via with nanocomposite by co-deposition process and hence improve the thermal property of the interconnector. However, co-deposition of metal and nanoparticles in micro via needs to overcome two difficulties: 1) Non-defect filling of micro via; 2) Increasing content of nanoparticles incorporating into the metal layer. It is crucial to find additives which have both inhibition effect on electrodeposition to achieve non-defect filling in micro via, and surface modification effect on nanoparticles to increase the content of nanoparticles in nanocomposite. This study investigated the dual effects of Cetyltrimethyl Ammonium Bromide (CTAB) as suppressor and surfactant on co-deposition of SiC/Cu in micro via. Experimental results showed that the CTAB had inhibition effect on electrodeposition, and non-defect filling of micro via was achieved by adding CTAB into the electrodeposition bath; The content of SiC nanoparticles in the nanocomposite was enhanced by adding CTAB into the co-deposition bath. Volume percentage (vol.%) of SiC in nanocomposite of the micro via was increased from 6.4 vol.% to 12.91 vol.% as the concentration of CTAB increased from 0 g/L to 0.3 g/L." @default.
- W2896639393 created "2018-10-26" @default.
- W2896639393 creator A5003642180 @default.
- W2896639393 creator A5009753699 @default.
- W2896639393 creator A5052511559 @default.
- W2896639393 creator A5063891035 @default.
- W2896639393 creator A5088281639 @default.
- W2896639393 date "2018-08-01" @default.
- W2896639393 modified "2023-10-17" @default.
- W2896639393 title "Dual Effects of CTAB on Co-deposition of SiC/Cu in Micro Via" @default.
- W2896639393 cites W1978718273 @default.
- W2896639393 cites W2009882757 @default.
- W2896639393 cites W2016907622 @default.
- W2896639393 cites W2022262056 @default.
- W2896639393 cites W2043118838 @default.
- W2896639393 cites W2067290233 @default.
- W2896639393 cites W2071260887 @default.
- W2896639393 cites W2075315368 @default.
- W2896639393 cites W2082164399 @default.
- W2896639393 cites W2082626445 @default.
- W2896639393 cites W2084745262 @default.
- W2896639393 cites W2090750824 @default.
- W2896639393 cites W2109782100 @default.
- W2896639393 cites W2155044490 @default.
- W2896639393 cites W2156698020 @default.
- W2896639393 cites W2161457407 @default.
- W2896639393 cites W2166999056 @default.
- W2896639393 cites W2523756697 @default.
- W2896639393 cites W2557052658 @default.
- W2896639393 cites W2562629440 @default.
- W2896639393 cites W2580787844 @default.
- W2896639393 cites W2613940077 @default.
- W2896639393 cites W2806606462 @default.
- W2896639393 doi "https://doi.org/10.1109/icept.2018.8480467" @default.
- W2896639393 hasPublicationYear "2018" @default.
- W2896639393 type Work @default.
- W2896639393 sameAs 2896639393 @default.
- W2896639393 citedByCount "2" @default.
- W2896639393 countsByYear W28966393932019 @default.
- W2896639393 countsByYear W28966393932020 @default.
- W2896639393 crossrefType "proceedings-article" @default.
- W2896639393 hasAuthorship W2896639393A5003642180 @default.
- W2896639393 hasAuthorship W2896639393A5009753699 @default.
- W2896639393 hasAuthorship W2896639393A5052511559 @default.
- W2896639393 hasAuthorship W2896639393A5063891035 @default.
- W2896639393 hasAuthorship W2896639393A5088281639 @default.
- W2896639393 hasConcept C127413603 @default.
- W2896639393 hasConcept C151730666 @default.
- W2896639393 hasConcept C155672457 @default.
- W2896639393 hasConcept C171250308 @default.
- W2896639393 hasConcept C192562407 @default.
- W2896639393 hasConcept C2779227376 @default.
- W2896639393 hasConcept C2779465129 @default.
- W2896639393 hasConcept C2816523 @default.
- W2896639393 hasConcept C42360764 @default.
- W2896639393 hasConcept C58226133 @default.
- W2896639393 hasConcept C64297162 @default.
- W2896639393 hasConcept C86803240 @default.
- W2896639393 hasConcept C92880739 @default.
- W2896639393 hasConceptScore W2896639393C127413603 @default.
- W2896639393 hasConceptScore W2896639393C151730666 @default.
- W2896639393 hasConceptScore W2896639393C155672457 @default.
- W2896639393 hasConceptScore W2896639393C171250308 @default.
- W2896639393 hasConceptScore W2896639393C192562407 @default.
- W2896639393 hasConceptScore W2896639393C2779227376 @default.
- W2896639393 hasConceptScore W2896639393C2779465129 @default.
- W2896639393 hasConceptScore W2896639393C2816523 @default.
- W2896639393 hasConceptScore W2896639393C42360764 @default.
- W2896639393 hasConceptScore W2896639393C58226133 @default.
- W2896639393 hasConceptScore W2896639393C64297162 @default.
- W2896639393 hasConceptScore W2896639393C86803240 @default.
- W2896639393 hasConceptScore W2896639393C92880739 @default.
- W2896639393 hasLocation W28966393931 @default.
- W2896639393 hasOpenAccess W2896639393 @default.
- W2896639393 hasPrimaryLocation W28966393931 @default.
- W2896639393 hasRelatedWork W1978254582 @default.
- W2896639393 hasRelatedWork W2021850748 @default.
- W2896639393 hasRelatedWork W2074924178 @default.
- W2896639393 hasRelatedWork W2121845575 @default.
- W2896639393 hasRelatedWork W2784288224 @default.
- W2896639393 hasRelatedWork W2952090460 @default.
- W2896639393 hasRelatedWork W3037079696 @default.
- W2896639393 hasRelatedWork W3046455606 @default.
- W2896639393 hasRelatedWork W4213291482 @default.
- W2896639393 hasRelatedWork W3091048374 @default.
- W2896639393 isParatext "false" @default.
- W2896639393 isRetracted "false" @default.
- W2896639393 magId "2896639393" @default.
- W2896639393 workType "article" @default.