Matches in SemOpenAlex for { <https://semopenalex.org/work/W2896759506> ?p ?o ?g. }
Showing items 1 to 97 of
97
with 100 items per page.
- W2896759506 abstract "To improve the efficiency of wafer fabrication, this work addresses the scheduling and control problems of mixed-processing with multiple wafer types in cluster tools. Then, based on a developed Pe..." @default.
- W2896759506 created "2018-10-26" @default.
- W2896759506 creator A5026660874 @default.
- W2896759506 creator A5058533540 @default.
- W2896759506 creator A5074774843 @default.
- W2896759506 creator A5078811719 @default.
- W2896759506 date "2018-08-18" @default.
- W2896759506 modified "2023-09-24" @default.
- W2896759506 title "Scheduling and optimization of mixed-processing with multi-variety wafers in dual-armed cluster tools" @default.
- W2896759506 cites W1971369168 @default.
- W2896759506 cites W1984750145 @default.
- W2896759506 cites W2002235729 @default.
- W2896759506 cites W2012448698 @default.
- W2896759506 cites W2019063470 @default.
- W2896759506 cites W2025592351 @default.
- W2896759506 cites W2033764666 @default.
- W2896759506 cites W2041266349 @default.
- W2896759506 cites W2055364613 @default.
- W2896759506 cites W2063846645 @default.
- W2896759506 cites W2073229720 @default.
- W2896759506 cites W2080618781 @default.
- W2896759506 cites W2104772533 @default.
- W2896759506 cites W2106659191 @default.
- W2896759506 cites W2109978925 @default.
- W2896759506 cites W2110050374 @default.
- W2896759506 cites W2115448177 @default.
- W2896759506 cites W2117906302 @default.
- W2896759506 cites W2127104083 @default.
- W2896759506 cites W2137987710 @default.
- W2896759506 cites W2141103600 @default.
- W2896759506 cites W2168765062 @default.
- W2896759506 cites W2320942828 @default.
- W2896759506 cites W2344326925 @default.
- W2896759506 cites W2523840226 @default.
- W2896759506 doi "https://doi.org/10.1080/02533839.2018.1516515" @default.
- W2896759506 hasPublicationYear "2018" @default.
- W2896759506 type Work @default.
- W2896759506 sameAs 2896759506 @default.
- W2896759506 citedByCount "4" @default.
- W2896759506 countsByYear W28967595062020 @default.
- W2896759506 countsByYear W28967595062021 @default.
- W2896759506 countsByYear W28967595062022 @default.
- W2896759506 crossrefType "journal-article" @default.
- W2896759506 hasAuthorship W2896759506A5026660874 @default.
- W2896759506 hasAuthorship W2896759506A5058533540 @default.
- W2896759506 hasAuthorship W2896759506A5074774843 @default.
- W2896759506 hasAuthorship W2896759506A5078811719 @default.
- W2896759506 hasConcept C111919701 @default.
- W2896759506 hasConcept C119599485 @default.
- W2896759506 hasConcept C120314980 @default.
- W2896759506 hasConcept C124952713 @default.
- W2896759506 hasConcept C127413603 @default.
- W2896759506 hasConcept C136197465 @default.
- W2896759506 hasConcept C142362112 @default.
- W2896759506 hasConcept C154945302 @default.
- W2896759506 hasConcept C160671074 @default.
- W2896759506 hasConcept C164866538 @default.
- W2896759506 hasConcept C173608175 @default.
- W2896759506 hasConcept C206729178 @default.
- W2896759506 hasConcept C21547014 @default.
- W2896759506 hasConcept C2780980858 @default.
- W2896759506 hasConcept C35750839 @default.
- W2896759506 hasConcept C41008148 @default.
- W2896759506 hasConceptScore W2896759506C111919701 @default.
- W2896759506 hasConceptScore W2896759506C119599485 @default.
- W2896759506 hasConceptScore W2896759506C120314980 @default.
- W2896759506 hasConceptScore W2896759506C124952713 @default.
- W2896759506 hasConceptScore W2896759506C127413603 @default.
- W2896759506 hasConceptScore W2896759506C136197465 @default.
- W2896759506 hasConceptScore W2896759506C142362112 @default.
- W2896759506 hasConceptScore W2896759506C154945302 @default.
- W2896759506 hasConceptScore W2896759506C160671074 @default.
- W2896759506 hasConceptScore W2896759506C164866538 @default.
- W2896759506 hasConceptScore W2896759506C173608175 @default.
- W2896759506 hasConceptScore W2896759506C206729178 @default.
- W2896759506 hasConceptScore W2896759506C21547014 @default.
- W2896759506 hasConceptScore W2896759506C2780980858 @default.
- W2896759506 hasConceptScore W2896759506C35750839 @default.
- W2896759506 hasConceptScore W2896759506C41008148 @default.
- W2896759506 hasFunder F4320321001 @default.
- W2896759506 hasLocation W28967595061 @default.
- W2896759506 hasOpenAccess W2896759506 @default.
- W2896759506 hasPrimaryLocation W28967595061 @default.
- W2896759506 hasRelatedWork W1504179122 @default.
- W2896759506 hasRelatedWork W1513409726 @default.
- W2896759506 hasRelatedWork W1835015521 @default.
- W2896759506 hasRelatedWork W1880774266 @default.
- W2896759506 hasRelatedWork W1882733036 @default.
- W2896759506 hasRelatedWork W1992741870 @default.
- W2896759506 hasRelatedWork W2039968861 @default.
- W2896759506 hasRelatedWork W2047114212 @default.
- W2896759506 hasRelatedWork W2160425906 @default.
- W2896759506 hasRelatedWork W3009396040 @default.
- W2896759506 isParatext "false" @default.
- W2896759506 isRetracted "false" @default.
- W2896759506 magId "2896759506" @default.
- W2896759506 workType "article" @default.