Matches in SemOpenAlex for { <https://semopenalex.org/work/W2896809733> ?p ?o ?g. }
Showing items 1 to 73 of
73
with 100 items per page.
- W2896809733 abstract "One of the challenges of actinic metrology tools for EUV lithography is the availability of light sources with high brightness, stability, and availability. In particular, actinic patterned mask inspection on EUV reticles is considered an essential tool for the EUV lithography ecosystem and it requires an EUV source of high brightness. We present the design of a compact and accelerator-based light source producing EUV radiation with high-brightness for actinic metrology applications in the semiconductor industry. Our design is based on the well-established components and design principles. The specifications required for actinic mask inspection is achieved using a short period undulator and 430 MeV electron energy. The concentric design of storage and booster rings enables stable operation with a relatively small footprint. This study shows the commercial viability of a compact and high-brightness EUV source with high stability and reliability and demonstrates its feasibility for actinic metrology applications." @default.
- W2896809733 created "2018-10-26" @default.
- W2896809733 creator A5001983867 @default.
- W2896809733 creator A5031528614 @default.
- W2896809733 creator A5031808189 @default.
- W2896809733 creator A5049508770 @default.
- W2896809733 creator A5058577632 @default.
- W2896809733 date "2018-10-08" @default.
- W2896809733 modified "2023-09-27" @default.
- W2896809733 title "A high-brightness accelerator-based EUV source for metrology applications" @default.
- W2896809733 cites W1974236738 @default.
- W2896809733 cites W2015712017 @default.
- W2896809733 cites W2016794323 @default.
- W2896809733 cites W2072464429 @default.
- W2896809733 cites W2086406124 @default.
- W2896809733 cites W2149084134 @default.
- W2896809733 cites W2302203613 @default.
- W2896809733 cites W2536481686 @default.
- W2896809733 cites W2741142785 @default.
- W2896809733 cites W2774204559 @default.
- W2896809733 doi "https://doi.org/10.1117/12.2501930" @default.
- W2896809733 hasPublicationYear "2018" @default.
- W2896809733 type Work @default.
- W2896809733 sameAs 2896809733 @default.
- W2896809733 citedByCount "3" @default.
- W2896809733 countsByYear W28968097332019 @default.
- W2896809733 countsByYear W28968097332020 @default.
- W2896809733 countsByYear W28968097332021 @default.
- W2896809733 crossrefType "proceedings-article" @default.
- W2896809733 hasAuthorship W2896809733A5001983867 @default.
- W2896809733 hasAuthorship W2896809733A5031528614 @default.
- W2896809733 hasAuthorship W2896809733A5031808189 @default.
- W2896809733 hasAuthorship W2896809733A5049508770 @default.
- W2896809733 hasAuthorship W2896809733A5058577632 @default.
- W2896809733 hasBestOaLocation W28968097332 @default.
- W2896809733 hasConcept C120665830 @default.
- W2896809733 hasConcept C121332964 @default.
- W2896809733 hasConcept C125245961 @default.
- W2896809733 hasConcept C146617872 @default.
- W2896809733 hasConcept C160671074 @default.
- W2896809733 hasConcept C162996421 @default.
- W2896809733 hasConcept C192562407 @default.
- W2896809733 hasConcept C195766429 @default.
- W2896809733 hasConcept C204223013 @default.
- W2896809733 hasConcept C49040817 @default.
- W2896809733 hasConceptScore W2896809733C120665830 @default.
- W2896809733 hasConceptScore W2896809733C121332964 @default.
- W2896809733 hasConceptScore W2896809733C125245961 @default.
- W2896809733 hasConceptScore W2896809733C146617872 @default.
- W2896809733 hasConceptScore W2896809733C160671074 @default.
- W2896809733 hasConceptScore W2896809733C162996421 @default.
- W2896809733 hasConceptScore W2896809733C192562407 @default.
- W2896809733 hasConceptScore W2896809733C195766429 @default.
- W2896809733 hasConceptScore W2896809733C204223013 @default.
- W2896809733 hasConceptScore W2896809733C49040817 @default.
- W2896809733 hasLocation W28968097331 @default.
- W2896809733 hasLocation W28968097332 @default.
- W2896809733 hasOpenAccess W2896809733 @default.
- W2896809733 hasPrimaryLocation W28968097331 @default.
- W2896809733 hasRelatedWork W1969012939 @default.
- W2896809733 hasRelatedWork W1986891334 @default.
- W2896809733 hasRelatedWork W2001383366 @default.
- W2896809733 hasRelatedWork W2013361263 @default.
- W2896809733 hasRelatedWork W2065128404 @default.
- W2896809733 hasRelatedWork W2114583378 @default.
- W2896809733 hasRelatedWork W2543894811 @default.
- W2896809733 hasRelatedWork W2808671532 @default.
- W2896809733 hasRelatedWork W2896809733 @default.
- W2896809733 hasRelatedWork W2949282974 @default.
- W2896809733 isParatext "false" @default.
- W2896809733 isRetracted "false" @default.
- W2896809733 magId "2896809733" @default.
- W2896809733 workType "article" @default.