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- W2896825601 abstract "The present work concerns collisional mixing which is one of the factors limiting the depth resolution of sputter profiling. A general treatment comprising the effects of recoil implantation and cascade mixing on the distortion of an impurity profile in a bulk matrix is presented. The statistics of the distorting events is shown to be a close analogue to that of the stopping of charged particles in random matter, and describable in terms of the Bothe-Landau theory of energy loss; a general expression is given for the Green's function transforming a given impurity profile into an apparent (or distorted) profile. In the diffusion approximation, the present theory yields a well defined shift and smearing of an impurity profile without introduction of a (more or less arbitrary) effective minimum energy for displacement." @default.
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- W2896825601 date "1980-01-01" @default.
- W2896825601 modified "2023-09-23" @default.
- W2896825601 title "Distortion of depth profiles during sputtering" @default.
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- W2896825601 doi "https://doi.org/10.1016/0029-554x(80)91281-1" @default.
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